X-ray Inspection Apparatus with Real-time Intensity Correction

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Solution Overview

Problem

Existing X-ray inspection systems face challenges in maintaining continuous inspection of long sheet-like samples due to the need for regular radiation intensity corrections, which are difficult to perform without interrupting the inspection process, especially when the sample is continuously present between the X-ray source and detector.

Innovation Solution

An X-ray inspection apparatus and method that utilize a line sensor with pixels arranged orthogonally to detect X-rays, an image storage unit for intensity correction, and a defect detector to continuously correct X-ray intensity by using the initial inspection region's intensity as a reference, allowing for real-time correction without requiring a sample-free period or boundary detection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If regular radiation intensity correction is performed by stopping inspection, then detection accuracy is maintained, but inspection continuity is interrupted

Engineering Contradiction:
Improvedetection accuracyVSAvoidinspection continuity
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent implements continuous inspection by performing radiation intensity correction simultaneously with sample inspection. The correction operation uses samples from specific regions (e.g., leading or trailing edges) to calculate correction coefficients while other samples are being inspected, eliminating the need to stop the inspection process and maintaining continuous operation.

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The patent introduces an intermediary approach by using specific sample regions (boundary regions or designated correction regions) as mediators for correction operations. These intermediary regions provide the necessary data for correction without requiring complete inspection interruption, allowing correction to proceed parallel to normal inspection.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If radiation intensity correction is performed without sample-free period, then inspection efficiency is improved, but correction accuracy deteriorates

Engineering Contradiction:
Improveinspection efficiencyVSAvoidcorrection accuracy
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The patent applies local quality by designating specific regions of the sample (such as leading edge, trailing edge, or boundary regions) for correction operations. These specific local regions are used to calculate correction coefficients, while other regions undergo normal inspection. This localized approach ensures correction accuracy is maintained using dedicated regions while overall inspection efficiency is preserved.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent segments the sample into different functional regions: correction regions (for intensity correction) and inspection regions (for defect detection). By dividing the sample into these segments and using specific segments for specific purposes, the system maintains correction accuracy while enabling continuous inspection without complete interruption.

Inventive Principle:
Principle #1Segmentation

3Productivity

If X-ray source intensity varies with temperature rise, then inspection stability deteriorates, but continuous operation is maintained

Engineering Contradiction:
Improvecontinuous operationVSAvoidinspection stability
Core Design Contradiction:
ProductivityVSStability of the object's composition

Solution Approach 1:

The patent implements feedback by continuously monitoring radiation intensity using specific sample regions and calculating correction coefficients based on detected intensity variations. These correction coefficients are then applied to compensate for intensity changes caused by temperature rise or other factors, creating a closed-loop feedback system that maintains inspection stability during continuous operation.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent compensates for temperature-induced intensity variations by dynamically adjusting correction parameters (correction coefficients) based on real-time intensity measurements. This parameter adjustment approach allows the system to maintain stable inspection results despite changes in X-ray source temperature and intensity during continuous operation.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables continuous inspection of long sheet-like samples by correcting X-ray intensity in real-time, maintaining high detection accuracy without interrupting the inspection process, even for samples like lithium ion cell separators or carbon paper sheets.

Implementation Method 1

an X-ray source configured to irradiate a sample with X-rays

Methodology Applied
Scientific EffectX-ray radiation: X-Ray

Implementation Method 2

an X-ray detector comprising a line sensor which is provided with a plurality of pixels that are arranged along a direction orthogonal to the certain direction and is configured to detect the X-rays which passed through the sample at the pixels

Methodology Applied
Scientific EffectX-ray detection: Photoelectric Effect

Data Source

PatentUS11340176B2X-ray inspection apparatus and X-ray inspection method
Publication Date: 2022.05.24 HITACHI HIGH TECH ANALYSIS CORP
  • US11340176B2 patent drawing
  • US11340176B2 patent drawing
  • US11340176B2 patent drawing

AI summary

The X-ray inspection apparatus includes an X-ray source, a sample moving mechanism, an X-ray detector equipped with a line sensor with pixels detecting X-ray radiation passing through a sample, an image storage unit for storing X-ray radiation intensities, an intensity correction unit for correcting the X-ray radiation intensities stored in the image storage unit, and a defect detector for detecting a defect in the sample. The intensity correction unit sets an intensity of X-rays detected from the inspection initiation region after starting inspection of the sample or an intensity of X-rays preliminarily detected from the sample before starting the inspection as a reference radiation intensity, and corrects an intensity of X-rays detected from the subsequent inspection region based on a correction coefficient obtained from comparison between the intensity of X-rays detected from the subsequent inspection region and the reference radiation intensity.