X-ray Microscopy Using Talbot Interference Fringes

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Solution Overview

Problem

Conventional x-ray microscopes face limitations in achieving high resolution and a large field of view simultaneously, with existing systems either having limited resolution or impractically long acquisition times for achieving reasonable signal-to-noise ratios.

Innovation Solution

The use of an array of micro- or nano-scale x-ray beams for selective illumination of objects, combined with an array detector that only detects x-rays corresponding to specific micro-beams, allows for high-resolution imaging with larger detector pixels and improved field of view through techniques like Talbot interference fringes and structured illumination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional x-ray microscopy uses imaging optics (zone plates) to achieve high resolution, then resolution improves to less than 100 nm, but field of view becomes extremely limited

Engineering Contradiction:
ImproveresolutionVSAvoidfield of view
Core Design Contradiction:
Measurement precisionVSArea of stationary object

Solution Approach 1:

The invention segments the x-ray beam into multiple micro-beams using a beam splitter, where each micro-beam illuminates a specific region of the object. This allows parallel acquisition of multiple regions, effectively expanding the field of view while maintaining high resolution through the focused nature of individual micro-beams.

Inventive Principle:
Principle #1Segmentation

2Area of stationary object

If projection-based x-ray microscopes use larger detector pixels to increase field of view, then field of view improves, but resolution deteriorates to worse than 1 micron

Engineering Contradiction:
Improvefield of viewVSAvoidresolution
Core Design Contradiction:
Area of stationary objectVSMeasurement precision

Solution Approach 1:

The beam splitter acts as an intermediary element that couples the x-ray source to the detector through multiple micro-beams. It enables the use of larger detector pixels by spatially distributing the illumination across multiple regions, allowing each pixel to detect signals from corresponding micro-beam regions while maintaining overall high resolution through the micro-beam structure.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Measurement precision

If conventional x-ray microscopes use smaller detector pixels to achieve high resolution, then resolution improves to better than 1 micron, but acquisition time becomes impractically long

Engineering Contradiction:
ImproveresolutionVSAvoidacquisition time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

By segmenting the beam into multiple micro-beams that illuminate different regions simultaneously, the system acquires data from multiple areas in parallel. This parallel acquisition dramatically reduces the total integration time required to achieve the same signal-to-noise ratio that would require sequential scanning with conventional single-beam systems.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention combines multiple micro-beam measurements into a single integrated image through the beam splitter architecture. Multiple regions are imaged simultaneously and merged into one composite image, achieving high resolution with reduced acquisition time by combining information from multiple spatial locations in parallel rather than sequentially.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the generation of high-resolution images with shorter integration times, overcoming the limitations of conventional x-ray microscopy by decoupling illumination spot size from detector pixel size and allowing for efficient data collection across a larger area.

Implementation Method 1

the micro- or nano-scale beams may be provided by producing a set of Talbot interference fringes, which can create a set of fine x-ray micro-beams propagating in space

Methodology Applied
Scientific EffectTalbot interference fringes: Interference

Implementation Method 2

An array detector is positioned such that each pixel of the detector only detects x-rays corresponding to a single micro-beam

Methodology Applied
Scientific EffectX-ray detection: X-Ray

Data Source

PatentUS10352880B2Method and apparatus for x-ray microscopy
Publication Date: 2019.07.16 SIGRAY INC
  • US10352880B2 patent drawing
  • US10352880B2 patent drawing
  • US10352880B2 patent drawing

AI summary

This disclosure presents systems for x-ray microscopy using an array of micro-beams having a micro- or nano-scale beam intensity profile to provide selective illumination of micro- or nano-scale regions of an object. An array detector is positioned such that each pixel of the detector only detects x-rays corresponding to a single micro- or nano-beam. This allows the signal arising from each x-ray detector pixel to be identified with the specific, limited micro- or nano-scale region illuminated, allowing sampled transmission image of the object at a micro- or nano-scale to be generated while using a detector with pixels having a larger size and scale. Detectors with higher quantum efficiency may therefore be used, since the lateral resolution is provided solely by the dimensions of the micro- or nano-beams. The micro- or nano-scale beams may be generated using an arrayed x-ray source or a set of Talbot interference fringes.