X-Ray Reflection Analysis Using Multi-Order Mode Signal Fitting
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Solution Overview
Problem
Current X-ray measurement systems face inefficiencies in analyzing small samples due to weak signals requiring long integration times, and complex samples demand extensive computational resources, prolonging measurement times and reducing overall efficiency.
Innovation Solution
An X-ray reflection analysis system utilizing multi-order mode signals, employing an X-ray generator, optical elements, and a processing device to collect and analyze signals with different orders, using fast fitting models to reduce measurement time and increase throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If extended integration times are used to acquire sufficient data quality for small regions, then measurement precision is improved, but measurement time increases significantly
Solution Approach 1:
The patent segments the X-ray signal analysis into multiple diffraction orders (zeroth order, first order, second order, etc.), where each order provides complementary information about the sample structure. By analyzing multiple segmented signal components simultaneously rather than relying on a single integrated measurement, the system achieves sufficient data quality with reduced integration time.
Solution Approach 2:
The patent transitions from analyzing a single-dimensional signal (traditional X-ray reflection) to multi-dimensional analysis by incorporating multiple diffraction orders and their respective mode signals. This dimensional expansion provides richer structural information, enabling faster convergence to precise measurements without requiring extended integration times.
2Measurement precision
If measurements are performed at multiple angles to capture structural variations, then measurement precision is improved, but total measurement time becomes significantly longer
Solution Approach 1:
The patent segments the structural information extraction by utilizing different diffraction orders, where each order is sensitive to specific structural parameters. This segmentation allows the system to obtain comprehensive structural variations through a reduced angular sweep, as each diffraction order provides targeted structural insights without requiring exhaustive angular measurements.
Solution Approach 2:
The patent changes the analysis parameter from angular scanning to diffraction order analysis. By focusing on multiple diffraction orders at reduced angular ranges, the system captures structural variations efficiently. The mode signals extracted from different orders provide sensitive characteristics that enable precise structural parameter determination with minimal angular displacement measurements.
3Manufacturing precision
If extensive computational resources are allocated to fitting analysis of complex samples, then manufacturing precision is improved, but overall efficiency decreases
Solution Approach 1:
The patent segments the fitting analysis process into two distinct stages: a first fitting analysis using a simplified model for initial parameter estimation, and a second fitting analysis using a more complex model for refined parameter extraction. This segmentation reduces computational burden by avoiding the application of computationally intensive models to all data points, while still achieving high manufacturing precision through the second stage fitting on selectively processed data.
Solution Approach 2:
The patent performs preliminary action by conducting the first fitting analysis using computationally efficient models to obtain initial structural parameters before proceeding to the second fitting analysis. This preliminary estimation narrows down the parameter search space and provides starting values that accelerate convergence in the subsequent detailed fitting process, thereby improving overall computational efficiency without sacrificing accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system significantly reduces measurement time and increases throughput by capturing sensitive characteristics of higher-order mode signals and employing fast, accurate fitting models.
Implementation Method 1
an X-ray generator configured to generate a measurement X-ray beam
Implementation Method 2
an X-ray optical element group configured to guide the measurement X-ray beam to a to-be-measured sample
Implementation Method 3
X-ray reflection analysis system
Implementation Method 4
an X-ray detector configured to receive the to-be-measured X-ray signal generated by the measurement X-ray beam irradiating the to-be-measured sample
Data Source
AI summary
An X-ray reflection analysis system and an X-ray reflection analysis method utilizing multi-order mode signals are provided. The X-ray reflection analysis system includes an X-ray generator, an X-ray optical element group, an X-ray detector and a processing device. The X-ray generator generates a measurement X-ray beam. The X-ray optical element group guides the measurement X-ray beam to a to-be-measured sample. The X-ray detector receives the to-be-measured X-ray signal generated by the measurement X-ray beam irradiating the to-be-measured sample. The processing device collects the to-be-measured X-ray signal and extracts mode signals; performs a first fitting analysis process on the mode signals whose order is less than a predetermined order to generate initial parameter ranges; and based on the initial parameter ranges, performs a second fitting analysis process on the mode signals whose order is greater than or equal to the predetermined order, to generate parameter fitting results.