X-ray optics assembly with ball joint adjustment unit
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Solution Overview
Problem
Existing X-ray diffractometers are limited in their ability to switch between different measurement geometries efficiently, requiring significant conversion and adjustment measures, which hinders universal application and high-resolution X-ray diffraction measurements.
Innovation Solution
An X-ray optics assembly with a monochromator attached to a two-degree-of-freedom ball joint adjustment unit, allowing for precise rotation and positioning to switch between three beam paths without additional conversion measures, enabling quick switching between Bragg-Brentano, parallel beam, and high-resolution geometries.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a switching system with only two beam paths is used, then the device complexity is reduced, but the measurement precision and resolution are insufficient for high-resolution X-ray diffraction information
Solution Approach 1:
The switching system is segmented into three distinct beam paths, each optimized for specific measurement geometries. The first beam path is configured for Bragg-Brentano geometry, the second for parallel beam geometry, and the third for high-resolution diffraction measurements with both multi-layer mirror and monochromator. This segmentation allows the system to achieve high measurement precision for different applications without requiring a single complex configuration to handle all cases.
2Adaptability or versatility
If conversion and adjustment measures are increased to enable different measurement geometries, then the adaptability is improved, but the ease of operation deteriorates due to required conversion and adjustment work
Solution Approach 1:
The switching system is designed with universal multi-functionality, where a single device can perform three different measurement geometries (Bragg-Brentano, parallel beam, and high-resolution diffraction) by simply switching between pre-configured beam paths. The optical elements (multi-layer mirror and monochromator) are positioned to automatically engage different beam paths based on the measurement geometry required, eliminating the need for conversion and adjustment work when changing measurement modes.
3Productivity
If the same X-ray diffractometer is used for different measurement geometries, then the productivity is improved, but the measurement precision deteriorates due to insufficient optical elements for high-resolution measurements
Solution Approach 1:
The system dynamically adapts its optical configuration by switching between three different beam paths depending on the measurement requirements. The switching system allows dynamic engagement of the multi-layer mirror and monochromator in the third beam path when high-resolution diffraction measurements are required, while maintaining efficient utilization of the instrument for routine measurements using the first two beam paths. This dynamic configuration ensures both high productivity and measurement precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables universal use of X-ray diffractometers for various measurement geometries with minimal adjustment, maximizing intensity and resolution, particularly in Bragg-Brentano for powder diffractometry and high-resolution measurements for defect analysis in semiconductor wafers.
Implementation Method 1
a multi-layer mirror, in particular a Goebel mirror
Implementation Method 2
a monochromator, in particular a channel-cut crystal
Data Source
Figure 1
Figure 2
Figure 3a
AI summary
An X-ray optics assembly (3) for an X-ray diffractometer (1), comprising a multilayer mirror (7) and a switching system (13) with which beam paths (15; 16; 17) for an X-ray beam can be selected, wherein the X-ray optics assembly (3) further comprises a monochromator (9), and wherein three beam paths (15; 16; 17) for the X-ray beam can be selected with the switching system (13), is characterized in that the monochromator (9) is attached to an adjustment unit (46) which is mounted with a joint (79) rotatable in two degrees of freedom, that the rotatable joint (79) is designed as a ball joint (79a), that a guide arrangement (84) with two opposing guide sections (82, 83) is provided, between which the adjustment unit (46) is guided in abutment, so that the adjustment unit (46) is parallel to a guide plane (FEB), which lies parallel to the guide sections (82, 83), about a first axis (y),The adjustment unit (46) is pivotable about a second axis (x) passing through the center point (M) of the ball joint (79a) and perpendicular to the guide plane (FEB), and is rotatable about a second axis (x) passing through the center point (M) of the ball joint (79a) and perpendicular to the first axis (y). Furthermore, the adjustment unit (46) rests against the guide sections (82, 83) at a distance from the center point (M) of the ball joint (79a) with respect to the direction of the second axis (x), thus preventing the adjustment unit (46) from pivoting about a third axis (z) passing through the center point (M) of the ball joint (79a) and perpendicular to both the first axis (y) and the second axis (x). The X-ray optics assembly or an associated X-ray diffractometer can be used even more universally for various measurement geometries and enables simple and precise adjustment of the monochromator.