X-ray Optics Swiveling for High-Speed Scanning

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Solution Overview

Problem

Existing X-ray scanning methods require displacement of the sample table in multiple directions for raster scanning, which limits scanning speed and introduces mechanical inaccuracies.

Innovation Solution

The method involves swiveling the X-ray optics about predefined axes to displace the measuring point within the sample, allowing for spatially resolved data acquisition without additional sample table movement, thereby enhancing scanning speed and reducing mechanical errors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the sample table is displaced in multiple directions for raster scanning, then the sample can be scanned across the entire area, but the scanning speed is limited and mechanical inaccuracies are introduced

Engineering Contradiction:

Improvescanning accuracyVSAvoidscanning speed

Core Design Contradiction:

Measurement precisionVSProductivity

Solution Approach 1:

The patent replaces the mechanical sample table displacement system with an optical scanning system. The X-ray optics are swiveled about predefined axes to displace the measuring point within the sample, substituting mechanical sample movement with optical beam manipulation. This eliminates the mechanical inaccuracies and speed limitations of the sample table while maintaining the ability to scan the entire sample area.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

Instead of moving the sample to scan it, the patent inverts the approach by moving the X-ray measuring beam across the sample. The measuring point is displaced by swiveling the X-ray optics, while the sample remains stationary. This inversion eliminates the need for mechanical sample table movement and its associated problems.

Inventive Principle:

Principle #13The other way round (Inversion)

2Measurement precision

If the sample table is displaced in multiple directions for raster scanning, then complete sample coverage is achieved, but mechanical errors are introduced

Engineering Contradiction:

Improvescanning accuracyVSAvoidmechanical accuracy

Core Design Contradiction:

Measurement precisionVSReliability

Solution Approach 1:

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Productivity

If the measuring point is displaced by swiveling X-ray optics, then scanning speed is enhanced and mechanical inaccuracies are reduced, but the system complexity increases

Engineering Contradiction:

Improvescanning speedVSAvoidoptical system complexity

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The X-ray optics system serves multiple functions: it focuses the X-ray beam onto the sample and simultaneously enables scanning by swiveling about predefined axes. This multi-functionality reduces the need for separate scanning mechanisms, offsetting the increased optical system complexity with functional consolidation.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables faster and more accurate scanning by maintaining the intensity of the X-ray beam and minimizing mechanical inaccuracies, allowing for rapid and low-vibration displacement of the measuring point.

Implementation Method 1

irradiating a sample with X-rays... firing an anode with an electrode beam, wherein X-radiation is created

Methodology Applied

Scientific EffectX-ray radiation: X-Ray

Implementation Method 2

X-ray optics are adjusted within a measuring apparatus to a focal spot of an X-ray tube... the entry focal point is brought into line with a focal spot on an X-ray tube

Methodology Applied

Scientific EffectFocusing: Focusing

Implementation Method 3

swiveling the X-ray optics about a first swivel axis... a goniometer mechanism, however, is configured so that for the typically (very small) swivel angles of the X-ray optics, a translational movement of the optical entry point away from or towards the (during the swiveling stationary) swivel axis in relation to a translational movement along the scanning direction can be disregarded

Methodology Applied

Scientific EffectRotational movement:

Implementation Method 4

detecting radiation emanating from the sample at, at least, two measuring points along the first scanning direction... The radiation emanating from the sample can, for example, be emitted, reflected or transmitted radiation

Methodology Applied

Scientific EffectRadiation detection:

Implementation Method 5

combining measured values correlating with the detected radiation to form an overall scan... Combining the measured values into the overall scan takes place with spatial resolution according to the measuring point

Methodology Applied

Scientific EffectData combination:

Data Source

PatentUS12106867B2Method for scanning a sample by means of X-ray optics and an apparatus for scanning a sample

Publication Date: 2024.10.01 BRUKER NANO INC

AI summary

A method for scanning a sample by means of X-ray optics for irradiating the sample with X-rays, comprises the following steps:(a) displacing a measuring point, defined by an optical exit point of the X-ray optics, in the sample in a first scanning direction by means of swiveling the X-ray optics about a first swivel axis;(b) detecting radiation emanating from the sample at, at least, two measuring points along the first scanning direction;(c) combining measured values correlating with the detected radiation to form an overall scan.