X-Ray Imaging Panel Contact-Hole Insulation for Low Leakage
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Solution Overview
Problem
The existing X-ray imaging panels face issues with increased leakage current due to unevenness in the photodiode's thickness direction, which affects the crystalline nature and reduces the resolution of the imaging panel.
Innovation Solution
The X-ray imaging panel design includes a photodiode with a second insulating film formed above the lower electrode, covering the first opening, which inhibits unevenness and connects the photodiode to the lower electrode, while a first insulating film covers the thin-film transistor and forms a contact hole for connection, reducing leakage current and allowing for improved resolution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the photoelectric conversion layer is disposed to fill the contact hole inside the lower electrode, then the area for every single pixel is decreased and resolution is improved, but the photodiode has unevenness in the thickness direction which causes increased leakage current
Solution Approach 1:
An insulating film is introduced as an intermediary layer between the lower electrode and the photodiode. This insulating film fills the contact hole and provides a flat surface for the photodiode, thereby eliminating the thickness unevenness that would otherwise cause increased leakage current, while still allowing the photodiode to fill the contact hole for high resolution
Solution Approach 2:
The insulating film is formed in advance before the photodiode is deposited. This preliminary action creates a flat surface that prevents thickness unevenness in the photodiode, ensuring both high resolution and low leakage current from the outset
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the resolution of the X-ray imaging panel by preventing unevenness in the photodiode, thereby reducing leakage current and allowing for smaller pixel dimensions and increased pitch between pixels.
Implementation Method 1
a photodiode that converts scintillation light that is obtained from an X-ray that passes through an object into a signal
Data Source
AI summary
An X-ray imaging panel includes: a photodiode that converts scintillation light that is obtained from an X-ray that passes through an object into a signal; a first thin-film transistor; a first insulating film that covers at least a part of the first thin-film transistor and that has a first opening above the first thin-film transistor; a lower electrode that is disposed below the photodiode, that covers at least a part of the first insulating film, that is formed in the first opening of the first insulating film, and that is connected to the first thin-film transistor in the first opening; and a second insulating film that is disposed above the lower electrode and that is formed in the first opening. The photodiode covers the first opening in which the second insulating film is formed, and the photodiode is connected to the lower electrode.