X-ray Sample Holder With Segmented Alignment Grids

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Solution Overview

Problem

Current X-ray microscopy (XRM) setups face limitations in sample handling efficiency due to variability in sample placement across different holders and repeated uses, leading to potential movement of samples during imaging, which affects the accuracy and throughput of high-resolution inspections.

Innovation Solution

A sample holder with a sample placement surface and two alignment portions, allowing precise positioning in all three spatial directions, combined with a flexible and radiation-stable fixing element for secure holding without adhesives, enables repeatable and accurate sample placement across different holders and uses.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional sample holders are used without specialized alignment features, then the device complexity is reduced, but the manufacturing precision and placement accuracy of samples deteriorate

Engineering Contradiction:
Improvesample placement accuracyVSAvoidsample holder structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The sample holder is segmented into distinct functional components: a sample placement surface for depth positioning, first alignment portions for width direction alignment, and second alignment portions for height direction alignment. This segmentation allows each component to perform its specific function optimally while maintaining overall simplicity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The alignment portions are positioned at intersections of alignment grids formed by edge lines on the sample placement surface. This dimensional arrangement creates a three-dimensional alignment system that provides precise positioning in all spatial directions (width, height, and depth) simultaneously.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If samples are held securely during X-ray imaging, then the reliability of imaging is improved, but the ease of operation for sample placement deteriorates

Engineering Contradiction:
Improvesample stability during imagingVSAvoidsample placement ease
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The alignment portions and alignment grids are pre-configured on the sample placement surface before sample insertion. This preliminary arrangement guides the sample into the correct position automatically, eliminating the need for complex adjustment procedures during operation and maintaining both ease of placement and imaging stability.

Inventive Principle:
Principle #10Preliminary action

3Measurement precision

If alignment portions are added to the sample holder, then the measurement precision of sample positioning is improved, but the device complexity increases

Engineering Contradiction:
Improvesample positioning precisionVSAvoidsample holder structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The alignment portions and alignment grids are designed to work together as a self-aligning system. When a sample is placed on the holder, the geometric relationship between the alignment portions and the sample edges automatically establishes precise positioning without requiring external measurement tools or complex adjustment mechanisms.

Inventive Principle:
Principle #25Self-service

Data Source

PatentUS12007339B2Sample holder, system and method
Publication Date: 2024.06.11 CARL ZEISS SMT INC
  • US12007339B2 patent drawing
  • US12007339B2 patent drawing
  • US12007339B2 patent drawing

AI summary

A sample holder for holding a sample during an X-ray imaging process includes a sample placement surface on which the sample is placed for positioning the sample in a depth direction of the sample holder. The sample holder also includes a first alignment portion for aligning the sample in a width direction of the sample holder, and a second alignment portion for aligning the sample in a height direction of the sample holder.