X-ray Scattering Tilt Analysis for Columnar Structures
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current methods for measuring the tilt of columnar scattering bodies in plate-shaped samples are either time-consuming and inaccurate or quick but lack precision, especially when analyzing complex shapes in semiconductor inspection processes.
Innovation Solution
An analysis apparatus and method that performs coordinate conversion of scattering intensity data from X-ray measurements to calculate the tilt of columnar scattering bodies using specific diffraction points, allowing for high-speed and accurate measurement of two-directional components without relying on complex shape models.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a complex shape model is used for analysis, then measurement accuracy is improved, but measurement time increases significantly
Solution Approach 1:
The patent extracts only the essential information needed for tilt measurement from the scattering data by focusing on specific diffraction points and their intensity relationships, rather than performing complete shape analysis. This selective extraction of critical parameters enables rapid tilt measurement without the time-consuming complex shape modeling process.
Solution Approach 2:
The patent segments the analysis into distinct components: identifying specific diffraction points, calculating intensity ratios, and determining tilt angles. By dividing the measurement process into these modular steps, the system achieves rapid tilt measurement independent of complex shape analysis, resolving the time-accuracy tradeoff.
2Productivity
If a simple shape model is used for analysis, then measurement time is reduced, but measurement accuracy deteriorates
Solution Approach 1:
The patent changes the analysis parameter from complete shape reconstruction to specific intensity ratio measurements at selected diffraction points. This parameter transformation enables simple, rapid analysis that maintains high tilt measurement accuracy by focusing on the critical intensity relationships that directly indicate tilt angle.
3Adaptability or versatility
If two-direction scanning is performed without shape model, then adaptability is improved, but measurement time increases and accuracy is insufficient
Solution Approach 1:
The patent performs preliminary identification of specific diffraction points and establishes intensity ratio relationships before actual tilt measurement. This preparatory work creates a streamlined analysis pathway that maintains adaptability to different sample types while enabling rapid tilt determination without time-consuming iterative shape modeling.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables rapid and precise measurement of the tilt of columnar scattering bodies, improving the efficiency and accuracy of semiconductor inspection processes by leveraging single and loop analysis techniques to determine tilt angles with high accuracy.
Implementation Method 1
data of a scattering intensity from the plate-shaped sample measured by transmission of X-rays
Implementation Method 2
intensity of a specific diffraction point
Data Source
AI summary
An analysis apparatus includes processing circuitry configured to store data of a scattering intensity measured by transmission of X-rays in one ω scan, perform coordinate conversion from the coordinate of the scattering vector to the coordinate of the tilt of the scattering body, with respect to a waveform based on the intensity of a specific diffraction point on the two-direction components, specify a peak position of the waveform of the intensity with respect to the coordinate of the tilt applied the coordinate conversion, and calculate a difference between the specified peak position and the peak position obtained on the assumption that the scattering body is not tilted from the direction perpendicular to the surface of the plate-shaped sample.