Multi-Layer X-Ray Source Annealing for Flux and Adhesion
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Solution Overview
Problem
Conventional X-ray sources face limitations in heat dissipation, leading to reduced X-ray flux and potential damage due to inadequate cooling methods, and multi-layer structures suffer from delamination issues due to weak adhesion between layers.
Innovation Solution
A multi-layer X-ray source structure with X-ray generating layers and thermally-conductive layers, where hydrogen planar density is less than 5×10^16/cm2 and carbide layers are formed between the layers through high-temperature annealing to enhance adhesion and reduce delamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If conventional cooling methods (rotation or active cooling) are used, then heat dissipation is achieved, but X-ray flux is limited and device complexity increases
Solution Approach 1:
The target is divided into multiple alternating layers of X-ray generating material (e.g., tungsten) and thermally conductive material (e.g., diamond), with each layer having a thickness of 1-50 micrometers. This segmentation allows simultaneous X-ray generation and efficient heat conduction through the layered structure, achieving high X-ray flux while maintaining effective heat dissipation without requiring rotation or external cooling systems.
2Temperature
If multi-layer structure is used to improve heat dissipation, then heat conduction is enhanced, but delamination occurs due to weak adhesion
Solution Approach 1:
The multi-layer target structure undergoes high-temperature annealing treatment (800-1500°C) in a vacuum or inert atmosphere during fabrication, before operation. This preliminary thermal processing promotes diffusion bonding and carbide formation at the interfaces between different material layers, significantly enhancing adhesion strength and preventing delamination during subsequent high-power operation.
Solution Approach 2:
The invention uses composite multi-layer structures combining materials with complementary properties: high-Z materials (tungsten, molybdenum) for X-ray generation, and high thermal conductivity materials (diamond, cubic boron nitride) for heat conduction. The interface between these dissimilar materials is strengthened through annealing-induced carbide formation and diffusion bonding, creating a reliable composite structure that maintains both thermal performance and structural integrity.
3Productivity
If electron beam power is increased to boost X-ray flux, then X-ray generation is enhanced, but heat accumulation damages the target
Solution Approach 1:
The layered structure provides locally optimized properties: X-ray generating layers with high atomic number materials concentrate electron beam energy to produce X-rays, while adjacent thermally conductive layers immediately conduct heat away from the impact zone. This local differentiation of material properties allows high electron beam power to be applied without heat accumulation, as each location performs its specialized function efficiently.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration achieves a three-fold increase in X-ray flux and improved mechanical stability, allowing for higher power operation and longer target lifetime while preventing delamination, thus enabling higher throughput and resolution in X-ray applications.
Implementation Method 1
at least one thermally-conductive layer in thermal communication with each X-ray generating layer
Implementation Method 2
carbide layers formed between each layer of X-ray generating material and thermally-conductive material
Implementation Method 3
planar density hydrogen held within some or all of the X-ray generating layers is less than 5×10^16/cm2
Data Source
AI summary
The present disclosure relates to multi-layer X-ray sources having decreased hydrogen within the layer stack and/or tungsten carbide inter-layers between the primary layers of X-ray generating and thermally-conductive materials. The resulting multi-layer target structures allow increased X-ray production, which may facilitate faster scan times for inspection or examination procedures.