X-ray Source Ion Collection Tool for Contamination Control

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Solution Overview

Problem

Existing X-ray sources face degradation due to contaminants such as charged and neutral particles, which reduce the efficiency of the cathode and X-ray window, leading to shorter useful life and more frequent maintenance.

Innovation Solution

An X-ray source combining an ion collection tool with an ionising tool, where the ionising tool, such as a second electron source, ionises neutral particles to prevent them from reaching sensitive areas, and the ion collection tool directs charged particles away from these areas, thereby reducing contamination and degradation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a heat source is employed to evaporate contaminants deposited on the window, then the window efficiency is restored, but the device complexity and energy consumption increase

Engineering Contradiction:
Improvewindow efficiencyVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent extracts the harmful charged particles from the system by using an ion collection electrode to collect and remove them from the vacuum chamber, preventing their deposition on sensitive components like the window and cathode, thereby eliminating the need for complex cleaning mechanisms

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent converts the harmful charged particles into a beneficial signal by using them as a diagnostic tool - the collected ions provide information about the vacuum quality and contamination levels, allowing for preventive maintenance before window efficiency degrades

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

2Reliability

If an electric field is arranged to deflect charged particles towards the cathode, then the cathode is protected from sputtering damage, but the charged particles may still deposit on the X-ray window

Engineering Contradiction:
Improvecathode efficiencyVSAvoidwindow contamination
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent segments the particle protection function into two independent components: an ion collection electrode that handles charged particles and prevents cathode damage, and a neutral particle handling system that addresses window contamination separately, allowing each component to be optimized for its specific function

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces an intermediary ion collection electrode between the interaction region and the cathode that acts as a filter for charged particles, capturing them before they can reach the cathode, while allowing the X-ray beam to pass through to the window

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If neutral contaminants are allowed to condense on the cathode, then the degradation process is slower compared to charged particles, but the cathode efficiency still degrades over time

Engineering Contradiction:
Improvecathode efficiencyVSAvoidcathode useful life
Core Design Contradiction:
ReliabilityVSDuration of action of stationary object

Solution Approach 1:

The patent performs preliminary action by continuously collecting charged particles throughout operation, preventing their accumulation and subsequent harmful effects on the cathode, thereby extending the cathode's useful life without requiring intermittent maintenance

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration significantly extends the useful life of the X-ray source by minimizing contamination and maintaining efficiency, reducing the need for frequent maintenance and avoiding the costs and complexity of heating mechanisms.

Implementation Method 1

an electron gun comprising a high-voltage cathode is utilised to produce an electron beam that impinges on a liquid jet

Methodology Applied
Scientific EffectBremsstrahlung radiation:

Implementation Method 2

The X-ray radiation generated by the interaction between the electron beam and the liquid jet

Methodology Applied
Scientific EffectX-ray generation: X-Ray

Implementation Method 3

an ionising tool for ionising particles

Methodology Applied
Scientific EffectIonisation: Ionisation

Implementation Method 4

the cathode is protected by an electric field arranged to deflect charged particles moving towards the cathode

Methodology Applied
Scientific EffectElectric field deflection: Electric Field

Data Source

PatentEP3472849B1X-ray source with ionisation tool
Publication Date: 2020.12.09 EXCILLUM
  • EP3472849B1 patent drawingFigure 1
  • EP3472849B1 patent drawingFigure 2~3
  • EP3472849B1 patent drawingFigure 4

AI summary

An X-ray source (1) and a corresponding method for generating X-ray radiation are disclosed. The X-ray source comprises a chamber (110) comprising an interaction region (I), and a first electron source (130) operable to emit a first electron beam, comprising electrons of a first energy, towards the interaction region such that the first electron beam interacts with a target (120) to generate X-ray radiation (150). The X-ray source further comprises a second electron source (160) adapted to be independently operated to emit a second electron beam comprising electrons of a second energy for ionising particles in the chamber, and an ion collection tool (170) that is adapted to remove the ionised particles from the chamber by means of an electromagnetic field (E). By ionising particles and preventing them from moving freely in the chamber, problems related to contamination of the chamber may be mitigated.