X-ray Source Ion Collection Tool for Contamination Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing X-ray sources face degradation due to contaminants such as charged and neutral particles, which reduce the efficiency of the cathode and X-ray window, leading to shorter useful life and more frequent maintenance.
Innovation Solution
An X-ray source combining an ion collection tool with an ionising tool, where the ionising tool, such as a second electron source, ionises neutral particles to prevent them from reaching sensitive areas, and the ion collection tool directs charged particles away from these areas, thereby reducing contamination and degradation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a heat source is employed to evaporate contaminants deposited on the window, then the window efficiency is restored, but the device complexity and energy consumption increase
Solution Approach 1:
The patent extracts the harmful charged particles from the system by using an ion collection electrode to collect and remove them from the vacuum chamber, preventing their deposition on sensitive components like the window and cathode, thereby eliminating the need for complex cleaning mechanisms
Solution Approach 2:
The patent converts the harmful charged particles into a beneficial signal by using them as a diagnostic tool - the collected ions provide information about the vacuum quality and contamination levels, allowing for preventive maintenance before window efficiency degrades
2Reliability
If an electric field is arranged to deflect charged particles towards the cathode, then the cathode is protected from sputtering damage, but the charged particles may still deposit on the X-ray window
Solution Approach 1:
The patent segments the particle protection function into two independent components: an ion collection electrode that handles charged particles and prevents cathode damage, and a neutral particle handling system that addresses window contamination separately, allowing each component to be optimized for its specific function
Solution Approach 2:
The patent introduces an intermediary ion collection electrode between the interaction region and the cathode that acts as a filter for charged particles, capturing them before they can reach the cathode, while allowing the X-ray beam to pass through to the window
3Reliability
If neutral contaminants are allowed to condense on the cathode, then the degradation process is slower compared to charged particles, but the cathode efficiency still degrades over time
Solution Approach 1:
The patent performs preliminary action by continuously collecting charged particles throughout operation, preventing their accumulation and subsequent harmful effects on the cathode, thereby extending the cathode's useful life without requiring intermittent maintenance
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly extends the useful life of the X-ray source by minimizing contamination and maintaining efficiency, reducing the need for frequent maintenance and avoiding the costs and complexity of heating mechanisms.
Implementation Method 1
an electron gun comprising a high-voltage cathode is utilised to produce an electron beam that impinges on a liquid jet
Implementation Method 2
The X-ray radiation generated by the interaction between the electron beam and the liquid jet
Implementation Method 3
an ionising tool for ionising particles
Implementation Method 4
the cathode is protected by an electric field arranged to deflect charged particles moving towards the cathode
Data Source
Figure 1
Figure 2~3
Figure 4
AI summary
An X-ray source (1) and a corresponding method for generating X-ray radiation are disclosed. The X-ray source comprises a chamber (110) comprising an interaction region (I), and a first electron source (130) operable to emit a first electron beam, comprising electrons of a first energy, towards the interaction region such that the first electron beam interacts with a target (120) to generate X-ray radiation (150). The X-ray source further comprises a second electron source (160) adapted to be independently operated to emit a second electron beam comprising electrons of a second energy for ionising particles in the chamber, and an ion collection tool (170) that is adapted to remove the ionised particles from the chamber by means of an electromagnetic field (E). By ionising particles and preventing them from moving freely in the chamber, problems related to contamination of the chamber may be mitigated.