Time-Sequence X-Ray Spectral Mapping for Sample State Change Detection

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing sample analysis techniques struggle to accurately identify state changes in samples, particularly organic samples, which are susceptible to thermal damage during electron beam irradiation, making it difficult to perform high-accuracy analysis before such changes occur.

Innovation Solution

A sample analysis apparatus and method that generates a plurality of spectrums in time sequence, creating one-dimensional maps and a two-dimensional contour map to identify state changes by detecting characteristic X-rays, and setting the analysis period before the state change occurs, using an optical system, a creation unit, and a display device to visualize inconsistencies in the contour map.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a sample is continuously irradiated with an electron beam to perform elemental analysis, then the analysis can be conducted, but the sample may undergo thermal damage and state changes that affect analysis accuracy

Engineering Contradiction:
Improveelemental analysis accuracyVSAvoidthermal damage to sample
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent applies preliminary action by performing elemental analysis on the sample before significant thermal damage occurs. The system continuously monitors the sample state during electron beam irradiation and completes the analysis during the stable period before degradation begins, ensuring accurate measurements while avoiding the harmful effects of prolonged irradiation.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent implements feedback by continuously monitoring the sample state during electron beam irradiation and using this information to determine when thermal damage begins to occur. This feedback mechanism allows the system to identify the optimal analysis window and adjust the measurement process to maintain sample integrity while achieving accurate elemental analysis.

Inventive Principle:
Principle #23Feedback

2Reliability

If multiple intensity spectrums are arranged in time sequence to identify sample state changes, then state changes can be detected, but it is difficult for users without thorough knowledge to identify changes accurately

Engineering Contradiction:
Improvestate change detection capabilityVSAvoiduser ability to identify state changes
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The patent applies color changes by mapping the intensity values in the spectrums to color representations in a two-dimensional contour map. This visual transformation allows users to easily identify sample state changes through color variations and patterns, making the analysis accessible to users without requiring thorough knowledge of spectrum interpretation while maintaining reliable state change detection.

Inventive Principle:
Principle #32Color changes

Solution Approach 2:

The patent applies dimensionality change by transforming one-dimensional intensity spectrums into a two-dimensional contour map where one dimension represents energy and the other represents time. This additional temporal dimension allows users to visually track sample state changes over time through color and pattern variations, significantly improving ease of operation while maintaining detection reliability.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Quantity of substance

If the analysis period is extended to capture more data, then more comprehensive analysis is possible, but the sample may undergo state changes that compromise analysis accuracy

Engineering Contradiction:
Improveamount of data collectedVSAvoidanalysis accuracy before state change
Core Design Contradiction:
Quantity of substanceVSMeasurement precision

Solution Approach 1:

The patent applies preliminary action by determining the optimal analysis period based on preliminary monitoring of the sample state. The system identifies when thermal damage begins to occur and sets the analysis period to capture sufficient data within this window, achieving both comprehensive data collection and high measurement precision by analyzing the sample before state changes compromise accuracy.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent implements feedback by continuously monitoring the sample state during irradiation and using this information to determine the appropriate analysis period. This feedback allows the system to balance data quantity and analysis accuracy by adjusting the measurement duration to match the sample's stable state, ensuring comprehensive yet accurate analysis.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise identification of state changes in samples by visualizing inconsistencies in the contour map, allowing for accurate sample analysis before thermal damage occurs, thereby improving analysis accuracy and reliability.

Implementation Method 1

irradiating electrons or an X-ray on the sample and detecting electromagnetic waves generated from the sample

Methodology Applied
Scientific EffectX-ray generation: X-Ray

Implementation Method 2

characteristic X-rays emitted from the sample are spectrally dispersed

Methodology Applied
Scientific EffectCharacteristic X-ray emission: X-Ray

Implementation Method 3

According to wavelength dispersive X-ray spectroscopy, the characteristic X-rays are spectrally dispersed by a diffraction grating to thereby generate the intensity spectrum

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 4

wavelength dispersive X-ray spectroscopy, the characteristic X-rays are spectrally dispersed by a diffraction grating

Methodology Applied
Scientific EffectWavelength dispersive X-ray spectroscopy: Diffraction Grating

Implementation Method 5

there also exists a technology of using a CCD camera to collectively detect the spatially spread-out characteristic X-rays emanated from the diffraction grating

Methodology Applied
Scientific EffectX-ray detection: X-Ray

Data Source

PatentEP3945310B1Sample analysis apparatus and method
Publication Date: 2025.12.03 JEOL LTD
  • EP3945310B1 patent drawingFigure 1
  • EP3945310B1 patent drawingFigure 2
  • EP3945310B1 patent drawingFigure 3

AI summary

Characteristic X-rays (soft X-rays) from a sample are detected using a spectroscope (12) to thereby generate a plurality of intensity spectrums arranged in order of time sequence. A contour map creation unit (74) creates a contour map (160) by converting, in accordance with a color conversion condition, the plurality of intensity spectrums into a plurality of one-dimensional maps, and arranging the plurality of one-dimensional maps in order of time sequence. When displaying the contour map (160), a waveform array (140) and a difference contour map (180) may also be displayed. Based on the contour map (160), a timepoint at which a state change occurs in the sample is determined.