Angle-Resolved X-Ray Spectrometer for Element Depth Profiling
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing x-ray wavelength dispersive spectrometry systems struggle to accurately resolve the emission angles of fluorescence x-rays emitted from small, complex structures, limiting their ability to provide depth distribution information of atomic elements within objects.
Innovation Solution
An angle-resolved wavelength dispersive spectrometer is designed with a plurality of x-ray detection elements and Bragg diffractors that receive and diffract fluorescence x-rays at specific angles, allowing for precise detection of x-rays emitted at different angles to determine depth distribution of atomic elements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional x-ray wavelength dispersive spectrometry systems are used, then the system structure is simpler, but the measurement precision of emission angles is insufficient
Solution Approach 1:
The detection system is segmented into multiple discrete detection elements, each assigned to detect fluorescence x-rays at specific emission angles. This segmentation enables precise angular resolution by distributing the detection function across multiple angle-specific elements rather than using a single undifferentiated detector.
Solution Approach 2:
A crystal diffractor is introduced as an intermediary component between the fluorescence source and detection elements. The diffractor mediates the x-ray beams by directing them to specific detection elements based on their emission angles, enabling precise angular separation and measurement through Bragg diffraction.
2Productivity
If the angular acceptance of detection elements is increased, then the detection efficiency is improved, but the emission angle resolution deteriorates
Solution Approach 1:
The total detection angular range is segmented into multiple discrete acceptance zones, each handled by a dedicated detection element. This segmentation allows each element to have a moderate angular acceptance that balances detection efficiency with angular resolution, as each element is optimized for its specific angular range rather than attempting to detect all angles.
Solution Approach 2:
Multiple detection elements are used as copies of the detection function, each replicated at different angular positions. This replication allows the system to maintain high angular resolution by having separate detection channels for different emission angles, while each individual detector can be designed with appropriate angular acceptance for its specific role.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system provides enhanced depth distribution information of atomic elements by accurately resolving the emission angles of fluorescence x-rays, even from small and complex structures, improving the accuracy of elemental analysis.
Implementation Method 1
at least one Bragg diffractor configured to receive and diffract a first set of fluorescence x-rays characteristic of and emitted by one or more atomic elements in an object
Implementation Method 2
a plurality of x-ray detection elements configured to receive and detect fluorescence x-rays emitted from a surface of an object being irradiated by an excitation beam
Implementation Method 3
fluorescence x-rays emitted from a surface of an object being irradiated by an excitation beam
Data Source
AI summary
An apparatus includes a plurality of x-ray detection elements configured to receive and detect fluorescence x-rays emitted from a surface of an object being irradiated by an excitation beam. The plurality of x-ray detection elements includes at least a first x-ray detection element configured to receive and detect at least a first portion of the fluorescence x-rays emitted at a first emission angle relative to the surface with a first angular acceptance of less than 30 degrees. The plurality of x-ray detection elements further includes at least a second x-ray detection element configured to receive and detect at least a second portion of the fluorescence x-rays emitted at a second emission angle relative to the surface with a second angular acceptance less than 30 degrees, the second emission angle larger than the first emission angle by at least 0.5 degree.