X-ray Spectroscopic Analysis Apparatus with Linear Sensor
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Solution Overview
Problem
Conventional X-ray spectroscopic analysis apparatuses face challenges in measuring samples with homogeneous composition across a wide area, as irradiating a wide area with excitation beams results in X-rays of different wavelengths being diffracted in the same direction, hindering spectrometry.
Innovation Solution
An X-ray spectroscopic analysis apparatus with a slit parallel to the irradiation area and analyzing crystal, combined with a linear X-ray sensor, allows only characteristic X-rays of specific wavelengths to pass through and be diffracted, enabling high-sensitivity analysis without the need for a micro analysis spot, and optionally includes an energy-detecting sensor for verifying composition homogeneity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If a wide area is irradiated with an excitation beam to obtain a large quantity of characteristic X-rays for high sensitivity analysis, then the sensitivity is improved, but X-rays of different wavelengths are diffracted in the same direction, preventing spectrometry
Solution Approach 1:
The patent segments the wide irradiation area into multiple linear portions along the direction parallel to the slit. Each linear portion corresponds to a specific wavelength range that can be selectively detected. This segmentation allows the system to maintain high sensitivity by utilizing the entire wide area while preserving spectral information by assigning different wavelength ranges to different linear portions.
Solution Approach 2:
The patent applies local quality by making each linear portion have a specific function corresponding to its position. The slit width and analyzing crystal orientation are optimized for each linear portion to detect specific wavelength ranges. This allows different regions of the irradiation area to contribute to different wavelength detections, enabling spectrometry while maintaining high overall sensitivity.
2Measurement precision
If a micro analysis spot is used to perform spectrometry with high resolution, then the measurement precision is improved, but the quantity of characteristic X-rays is reduced, lowering sensitivity
Solution Approach 1:
The patent merges multiple linear portions into a single detection system. Each linear portion detects characteristic X-rays from a specific wavelength range, and the combined output provides both high spectral resolution and high sensitivity. This merging allows the system to achieve the benefits of both micro-analysis (spectral resolution) and wide-area analysis (sensitivity).
3Measurement precision
If the slit width is reduced to improve wavelength discrimination, then the measurement precision is improved, but the quantity of X-rays reaching the detector is reduced, lowering sensitivity
Solution Approach 1:
The patent transitions from a single-point detection approach to a linear array detection approach. By arranging detection elements in a line parallel to the slit, the system detects X-rays from multiple positions simultaneously. This dimensional change allows the system to maintain a relatively wide slit width for high sensitivity while achieving good wavelength discrimination through the spatial distribution of detection elements across different linear portions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for high-sensitivity elemental analysis of samples with homogeneous composition across a wide area, improving resolution and accuracy by detecting characteristic X-rays from different linear portions and providing credibility through energy distribution analysis.
Implementation Method 1
A characteristic X-ray having a certain wavelength is diffracted and reflected only when the wavelength of the characteristic X-ray and the incidence angle of the characteristic X-ray on the analyzing crystal satisfy the condition of Bragg reflection
Implementation Method 2
a radiation source configured to irradiate a predetermined irradiation area in a surface of a sample with an excitation beam for generating a characteristic X-ray
Implementation Method 3
a detector that detects the X-ray diffracted on the analyzing crystal
Data Source
AI summary
An X-ray spectroscopic analysis apparatus includes: a radiation source configured to irradiate a predetermined irradiation area in the surface of a sample with an excitation beam for generating a characteristic X-ray; an analyzing crystal provided facing the irradiation area; a slit provided between the irradiation area and the analyzing crystal, the slit being parallel to the irradiation area and a predetermined crystal plane of the analyzing crystal; and an X-ray linear sensor including linear detection elements arranged in a direction perpendicular to the slit, the detection elements each having a length in a direction parallel to the slit. By detecting characteristic X-rays from different linear portions of the irradiation area for each wavelength, it is possible to perform analysis with sensitivity higher than the sensitivity of a conventional X-ray spectroscopic analysis apparatus that irradiates a point-like irradiation area with an excitation beam.