X-Ray Spectrum Difference Analysis for Chemical State Identification

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional spectral analysis methods face difficulties in accurately distinguishing chemical state changes from self-absorption effects due to shifts in absorption edges when varying the accelerating potential of an electron beam, particularly for transition metals.

Innovation Solution

A sample analysis apparatus and method that normalizes intensity spectra by equalizing the intensity at the top of a reference peak and calculates difference spectra, using a database to identify compounds and states based on these normalized and difference spectra, thereby reducing the influence of absorption edges.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the accelerating potential of the electron beam is varied to obtain intensity spectra, then the chemical bonding state and composition of the sample can be analyzed, but absorption edges cause peak energy shifts that make it difficult to distinguish between chemical state changes and self-absorption effects

Engineering Contradiction:
Improveaccuracy of chemical state identificationVSAvoidinformation loss due to absorption edge interference
Core Design Contradiction:
Measurement precisionVSLoss of information

Solution Approach 1:

The patent extracts the absorption edge effect from the intensity spectrum by calculating a difference spectrum between two intensity spectra obtained at different accelerating potentials. This separates the absorption-related information from the chemical state information, allowing the latter to be analyzed without interference from the former.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent uses two different accelerating potentials (excessive action) to obtain two intensity spectra. By using more than one measurement condition, the absorption edge effects can be differentiated from chemical state information through comparison and difference calculation.

Inventive Principle:
Principle #16Partial or excessive action

2Ease of operation

If conventional fingerprinting method is used for sample analysis, then the composition and state of the sample can be identified by comparing with database, but the method becomes ineffective when absorption edges are present near peaks of interest

Engineering Contradiction:
Improvesimplicity of sample analysisVSAvoidreliability of compound identification
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The patent changes the parameter used for identification from the original intensity spectrum to a difference spectrum. This parameter transformation eliminates the absorption edge interference while preserving the chemical state information, making the fingerprinting method reliable even when absorption edges are present.

Inventive Principle:
Principle #35Parameter changes

3Device complexity

If intensity spectrum is used directly for identification without normalization, then the analysis process is simple, but variations in accelerating potential cause peak shifts that reduce identification accuracy

Engineering Contradiction:
Improvesimplicity of analysis processVSAvoidaccuracy of peak position identification
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent performs preliminary normalization of the intensity spectra before calculating the difference spectrum. This preliminary action corrects for variations in accelerating potential and ensures that subsequent difference calculation accurately reflects chemical state information without peak position errors.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables accurate sample analysis by eliminating the impact of absorption edges, allowing for precise identification of compounds and their states even when the accelerating potential of the electron beam is varied.

Implementation Method 1

By irradiating an electron beam onto a sample and spectrally dispersing characteristic X-rays emitted from the sample

Methodology Applied
Scientific EffectX-ray emission: X-Ray

Implementation Method 2

By irradiating an electron beam onto a sample

Methodology Applied
Scientific EffectElectron beam irradiation: Electron Beam

Implementation Method 3

JP S63-39855 U discloses a technique of calculating an absorption spectrum from a difference between two intensity spectrums

Methodology Applied
Scientific EffectX-ray absorption: Absorption (EM radiation)

Data Source

PatentEP3945311B1Sample analysis apparatus and method
Publication Date: 2025.12.10 JEOL LTD
  • EP3945311B1 patent drawingFigure 1
  • EP3945311B1 patent drawingFigure 2
  • EP3945311B1 patent drawingFigure 3

AI summary

Spectrums are measured by irradiating an electron beam on a sample while varying an accelerating potential and by detecting X-rays emitted from the sample. A normalizer unit (94A) normalizes the spectrums and thereby calculates normalized spectrums. A difference calculator unit (94B) calculates difference spectrums based on the normalized spectrums. A search unit (96B, 98B) performs a search in a database (100) for each comparison difference spectrum, and identifies compounds contained in the sample.