X-Ray Spectrum Analysis Using Primary-Element Intrinsic Waveforms
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Solution Overview
Problem
Existing methods struggle to quantitatively analyze secondary elements in a sample with a primary element due to insufficient signal intensity and potential sample damage from increased electron beam illumination, leading to inaccurate results and prolonged measurement times.
Innovation Solution
An X-ray spectrum analysis apparatus and method that utilizes the intrinsic waveform of the primary element, generated by electron transitions from the valence band to the inner shell, to calculate the content of secondary elements by comparing this waveform with a reference, allowing for precise quantitative analysis without increasing illumination current or elongating measurement time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If the illumination current for electron beam is increased to increase the intensity of characteristic X-ray from secondary element, then the signal intensity is improved, but sample damage occurs more easily
Solution Approach 1:
The patent uses the primary element's characteristic X-ray signal as an intermediary to indirectly detect the secondary element. Instead of directly detecting the weak signal from the secondary element, the method detects the primary element's signal which is enhanced by the secondary element's presence, thereby avoiding the need to increase electron beam intensity that would cause sample damage.
Solution Approach 2:
The patent replaces the direct detection mechanism (detecting secondary element's characteristic X-ray) with an indirect detection mechanism (detecting primary element's characteristic X-ray signal changes). This substitution allows quantitative analysis of secondary elements without requiring increased electron beam illumination that would mechanically damage the sample.
2Measurement precision
If the signal accumulation time is elongated to improve the signal-to-noise ratio, then the measurement precision is improved, but the measurement time is elongated
Solution Approach 1:
The patent uses the primary element's characteristic X-ray signal as an intermediary that provides sufficient signal strength without requiring extended accumulation time. The primary element's signal serves as a proxy that reflects the secondary element's presence and concentration, enabling rapid measurement while maintaining precision.
Solution Approach 2:
The patent changes the detection parameter from direct detection of secondary element signals to detection of primary element signal characteristics. This parameter change allows the system to achieve high signal-to-noise ratios quickly, as the primary element's signal is inherently stronger and its variations can be detected rapidly without requiring prolonged accumulation.
3Measurement precision
If the characteristic X-ray spectrum of secondary element is observed directly, then the analysis is performed, but the signal intensity is insufficient and large errors occur
Solution Approach 1:
The patent introduces the primary element's characteristic X-ray signal as an intermediary indicator. Instead of directly observing the weak secondary element signal, the method observes the primary element's signal which changes in response to the secondary element's presence. This intermediary approach provides sufficient signal intensity for accurate quantitative analysis.
Solution Approach 2:
The patent substitutes the direct detection of secondary element signals with indirect detection through primary element signals. This substitution replaces a weak, error-prone detection system with a stronger, more reliable detection system that maintains measurement precision while achieving sufficient signal intensity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-precision, rapid quantitative analysis of secondary elements by leveraging the primary element's intrinsic waveform, avoiding sample damage and reducing measurement time, while providing accurate content determination.
Implementation Method 1
a generator that generates an X-ray spectrum including a waveform of interest which is an intrinsic waveform of a primary element, caused by transition of electrons from a valence band to an inner shell in the primary element, based on a detection signal acquired through detection of a characteristic X-ray emitted from a sample
Data Source
AI summary
A soft X-ray measurement device detects a characteristic X-ray emitted from a sample including a primary element and a secondary element. An X-ray spectrum generated by a spectrum generator includes a waveform of interest which is an intrinsic waveform of the primary element, caused by transition of electrons from a valence band to an inner shell in the primary element. A secondary element analyzer calculates quantitative information of the secondary element through analysis of the waveform of interest.