Synchronized X-Ray Spot Scanning for Blur-Free Large-Sample Imaging
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Solution Overview
Problem
Current X-ray imaging technologies face challenges in achieving high resolution and short inspection time for large samples, as smaller X-ray spots require lower X-ray flux to avoid overheating, leading to longer exposure times and increased inspection time, while moving samples induce image blur.
Innovation Solution
The method involves deflecting the electron beam to move the X-ray spot in synchronization with the sample's movement, allowing increased exposure time and reduced power density, thus avoiding overheating and motion-induced blurring, enabling high-resolution imaging of large samples within a shorter time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the X-ray spot size is decreased to improve resolution, then image resolution is improved, but the X-ray flux must be reduced to avoid overheating the target, which increases exposure time and inspection time
Solution Approach 1:
The patent applies dynamics by making the X-ray spot movable rather than stationary. The electron beam is deflected to scan the X-ray spot across the target in synchronization with sample movement, allowing the system to maintain high flux density while avoiding localized overheating through continuous position changes. This dynamic approach enables longer effective exposure times without compromising target integrity.
Solution Approach 2:
The patent implements continuous useful action by synchronizing the electron beam deflection with sample movement. The X-ray spot continuously tracks the sample position, ensuring that the entire sample area receives adequate X-ray exposure without interruption. This continuous scanning approach eliminates idle time between exposures and maintains optimal flux utilization throughout the inspection process.
2Productivity
If the sample is moved during imaging to increase throughput, then inspection speed is improved, but motion induces image blur that degrades resolution
Solution Approach 1:
The patent employs feedback by synchronizing the electron beam deflection with the sample movement. The system uses position information about the moving sample to control the electron optical system, ensuring that the X-ray spot remains precisely aligned with the intended imaging location on the sample throughout the exposure period. This feedback mechanism eliminates motion-induced blur while maintaining high inspection speeds.
Solution Approach 2:
The patent replaces mechanical movement of the entire imaging system with electronic control of the electron beam position. Instead of mechanically moving the X-ray source and detector in coordination with the sample, the system uses an electron optical system to deflect the electron beam and move the X-ray spot electronically. This substitution enables faster, more precise positioning without the mechanical inertia and vibration issues that cause image blur.
3Area of stationary object
If a plurality of detectors are used to acquire more information from the sample, then imaging coverage is improved, but each detector views the sample from a slightly different angle which induces image blur
Solution Approach 1:
The patent applies universality by enabling a single detector to perform the function of multiple detectors through synchronized scanning. The electron beam is deflected to scan the X-ray spot across different regions of the sample, and the single detector captures images from all these positions. This multi-functional approach achieves comprehensive imaging coverage while maintaining consistent viewing geometry, eliminating the angle-induced blur problem of multi-detector systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for high-resolution, high-quality images of large samples in a shorter time by coordinating the X-ray spot movement with the sample's motion, reducing overheating risks and motion-induced noise, and enabling imaging of samples larger than the field of view.
Implementation Method 1
providing an electron beam interacting with a target to generate X-ray radiation emitted from an X-ray spot on the target
Implementation Method 2
deflecting the electron beam such that the X-ray spot is moved on the target in accordance with the movement of the sample
Data Source
AI summary
A method for imaging a sample by means of an X-ray detector is disclosed, including providing an electron beam interacting with a target to generate X-ray radiation emitted from an X-ray spot on the target, moving the sample relative to the target, deflecting the electron beam such that the X-ray spot is moved over the target simultaneously and in accordance with the movement of the sample, and detecting X-ray radiation emitted from the X-ray spot and interacting with the sample.