Total-Reflection X-Ray Inspection for Surface Foreign Substance Detection
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Solution Overview
Problem
Current X-ray fluorescence methods struggle to detect foreign substances on the surface of inspection targets with high sensitivity due to low intensity ratios of generated fluorescent X-rays, which can lead to undetected defects in products like lithium ion batteries, potentially causing short-circuiting and explosions.
Innovation Solution
An inspection apparatus and method utilizing an X-ray generation tube that emits X-rays to an inspection plane, where X-rays from foreign substances are totally reflected by the target surface and detected by an X-ray detector with an energy resolution of at least 1 keV or without energy analysis, allowing for enhanced detection and material specification of foreign substances.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If X-ray fluorescence methods are used to detect foreign substances, then element specification is possible, but the intensity ratio of generated fluorescent X-rays becomes low making detection difficult
Solution Approach 1:
The invention changes the detection parameter from measuring fluorescent X-ray intensity (which has low signal-to-noise ratio) to measuring the energy spectrum of totally reflected X-rays. This parameter change enables detection of foreign substances with high sensitivity even when the fluorescent X-ray intensity is low, as the total reflection method captures the entire X-ray spectrum including characteristic lines from foreign substances.
2Measurement precision
If Grazing Incidence X-ray Fluorescence is used, then surface foreign substances can be detected, but incident X-rays are scattered reducing fluorescent X-ray intensity
Solution Approach 1:
The invention converts the harmful scattering effect into a beneficial measurement method. Instead of trying to overcome scattering that reduces fluorescent X-ray intensity, the method measures the scattered (totally reflected) X-rays directly. The scattering that was previously a problem becomes the measurement signal, enabling detection of foreign substances on surfaces with high sensitivity.
3Loss of information
If X-ray fluorescence analysis is performed on samples with foreign substances, then element identification is possible, but the separator breakage and short-circuit risks remain undetected
Solution Approach 1:
The invention performs preliminary detection of foreign substances on battery surfaces before shipping using the total reflection X-ray measurement method. By detecting foreign substances such as stainless steel particles that could cause separator breakage during vibration, the system prevents defective products from being distributed, thereby ensuring product safety and reliability before the product reaches the customer.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the sensitive detection of foreign substances, preventing defects and ensuring product safety by improving the detection accuracy and reducing the risk of explosions in lithium ion batteries and other applications.
Implementation Method 1
an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam
Implementation Method 2
X-rays emitted from a foreign substance existing on the inspection target surface and totally reflected by the inspection target surface
Data Source
AI summary
An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector has an energy resolution not less than 1 keV or the X-ray detector has no energy analysis function.