X-ray Topography Apparatus with Multilayer Film Mirror
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Solution Overview
Problem
Conventional X-ray topography apparatuses using laboratory-level X-ray sources struggle to acquire a large number of high-quality two-dimensional cross-sectional images within a reasonably short period due to low X-ray intensity, requiring excessively long exposure times.
Innovation Solution
An X-ray topography apparatus employing a minute focal spot X-ray source, a multilayer film mirror to convert X-rays into monochromatic and collimated high-intensity X-rays, and a slit to limit the X-ray width, combined with stepwise sample movement, allowing for the acquisition of several hundred images in one to twelve hours with sufficient contrast.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a laboratory-level X-ray source is used, then the device complexity is reduced and accessibility is improved, but the X-ray intensity is significantly attenuated requiring excessively long exposure times
Solution Approach 1:
A multilayer film mirror is introduced as an intermediary component between the laboratory-level X-ray source and the sample. This mirror concentrates and intensifies the X-ray beam, effectively bridging the gap between the limited output of laboratory sources and the high intensity normally requiring synchrotron facilities, thereby reducing exposure time from hours to minutes
Solution Approach 2:
The patent changes the physical parameters of the X-ray beam by using a multilayer film mirror to concentrate the X-rays, increasing the photon flux density at the sample position. This parameter change allows laboratory sources to achieve effective intensities comparable to synchrotron sources, resolving the time loss issue
2Measurement precision
If the X-ray beam width is limited with a slit to improve resolution, then the measurement precision is improved, but the X-ray intensity reaching the sample is significantly attenuated
Solution Approach 1:
The multilayer film mirror performs preliminary concentration and intensification of the X-ray beam before the beam reaches the slit. By pre-concentrating the X-rays, the system maintains high intensity even after the slit restricts the beam width, thereby preserving both resolution and intensity simultaneously
3Manufacturing precision
If a large number of section topographic images are acquired to improve manufacturing precision of crystal defect observation, then the measurement precision is improved, but the loss of time increases significantly
Solution Approach 1:
The multilayer film mirror serves as a time-saving intermediary by intensifying the X-ray beam, which enables rapid acquisition of multiple section topographic images. The concentrated X-ray flux allows each image to be captured in minutes rather than hours, making the acquisition of hundreds of images for precise 3D reconstruction practically feasible within acceptable timeframes
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the generation of high-resolution, clear two-dimensional cross-sectional images with a high signal-to-noise ratio, facilitating the observation of crystal defect structures within a practical time frame without the need for a synchrotron radiation facility.
Implementation Method 1
The multilayer film mirror converts the X-rays emitted from the X-ray source into monochromatic, collimated, high-intensity X-rays
Implementation Method 2
a slit member provided in a position between the sample and the X-ray source and including a slit that limits the width of the X-rays
Implementation Method 3
two-dimensional X-ray detection means for two-dimensionally detecting X-rays having exited out of the sample
Data Source
AI summary
Disclosed is an X-ray topography apparatus including an X-ray source, a multilayer film mirror, a slit, a two-dimensional X-ray detector, and a sample moving device that sequentially moves the sample to a plurality of step positions. The X-ray source is a minute focal spot. The multilayer film mirror forms monochromatic, collimated, high-intensity X-rays. The direction in which the multilayer film mirror collimates the X-rays coincides with the width direction of the slit. The step size by which the sample is moved is smaller than the width of the slit. The combination of the size of the minute focal spot, the width of the slit, and the intensity of the X-rays that exit out of the multilayer film mirror allows the contrast of an X-ray image produced when the detector receives X-rays for a predetermined period of 1 minute or shorter to be high enough for observation of the X-ray image.