X-ray Fluorescence Analyzer Helium Gas Sealing
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Solution Overview
Problem
Conventional X-ray fluorescence spectrometers face challenges in enhancing analysis precision for light elements with atomic numbers less than 23 due to X-ray absorption by atmospheric air and organic films, which also hinder efficient helium gas replacement in analysis chambers.
Innovation Solution
The spectrometer incorporates dual helium gas introduction means through the introduction and detection ports, with flow rate control to optimize helium gas replacement, eliminating the need for organic films and reducing analysis time by ensuring efficient gas exchange.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If organic films are used to cover opened parts to prevent gas flow, then gas sealing is improved, but X-ray absorption increases and analysis precision deteriorates
Solution Approach 1:
The invention removes the organic films from the opened parts (introduction port and detection port) and replaces them with helium gas filling. This extraction eliminates the X-ray absorbing organic films while maintaining gas sealing through the helium atmosphere, thereby resolving the contradiction between gas sealing reliability and measurement precision.
Solution Approach 2:
The invention creates an inert helium atmosphere inside the analysis chamber and extends it to the opened parts (introduction port and detection port). By filling these ports with helium gas, the system maintains gas sealing without using organic films, and the inert helium environment prevents X-ray absorption, thus improving both gas sealing reliability and measurement precision for light elements.
2Productivity
If helium gas replacement is made more efficient by covering opened parts with organic films, then gas replacement speed is improved, but X-ray absorption increases and analysis precision deteriorates
Solution Approach 1:
The invention extracts the organic films from the opened parts and replaces the sealing method with helium gas filling. This allows efficient helium gas replacement throughout the entire chamber including the opened parts, while eliminating the harmful X-ray absorption effect of organic films, thus resolving the contradiction between gas replacement productivity and measurement precision.
Solution Approach 2:
By extending the inert helium atmosphere to include the opened parts (introduction port and detection port), the invention achieves efficient gas replacement without using organic films. The helium-filled ports maintain sealing while allowing rapid gas exchange, and simultaneously prevent X-ray absorption, resolving the contradiction between gas replacement efficiency and analysis precision.
3Device complexity
If single-point helium gas introduction is used, then device complexity is reduced, but gas replacement completeness deteriorates
Solution Approach 1:
The invention segments the helium gas introduction into two separate points: the introduction port and the detection port. By providing introduction means at both locations, the system ensures complete helium gas replacement throughout the entire analysis chamber, including areas that would be difficult to reach from a single point. This segmentation improves gas replacement completeness while maintaining relatively simple device structure.
Solution Approach 2:
The invention adds a spatial dimension to gas introduction by placing introduction means at two different locations (introduction port and detection port) rather than relying on a single point. This multi-point introduction from different spatial positions ensures comprehensive helium gas distribution and complete replacement throughout the chamber, improving reliability without significantly increasing device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances analysis precision and sensitivity for light elements by stabilizing fluorescent X-ray intensity faster, reducing analysis time, and preventing X-ray absorption, thereby improving the overall analysis capability.
Implementation Method 1
the primary X-ray and the fluorescent X-ray are absorbed and attenuated by the atmospheric air
Implementation Method 2
a primary X-ray emitted from an X-ray source
Implementation Method 3
a fluorescent X-ray that is emitted from the sample when the sample is irradiated with the primary X-ray
Data Source
Figure 1
Figure 2A~2B
Figure 3A~3B
AI summary
The present invention has an object to provide an X-ray fluorescence spectrometer capable of preventing a decrease in analysis precision of light elements whose atomic number is less than 23 and making helium gas replacement for the inside of an analysis chamber more efficient. An X-ray fluorescence spectrometer of the present invention includes: an X-ray tube 12 for irradiating a sample S on a sample stage 14 with a primary X-ray, the sample stage 14 having an X-ray passing port 141; a detector 13 for detecting a fluorescent X-ray emitted from the sample S; an analysis chamber 16 having an introduction port 17 for the primary X-ray emitted from the X-ray tube 12 and a detection port 181 for the detector 13, the analysis chamber 16 containing an internal space including an optical path of the primary X-ray from the introduction port 17 to the X-ray passing port 141 and an optical path of the fluorescent X-ray from the X-ray passing port 141 to the detection port 181; first and second introduction pipes 201 and 202 for introducing helium gas supplied from a helium gas cylinder 22 into the analysis chamber 16 through the introduction port 17 and the detection port 181, respectively; and a flow rate control valve 24 for controlling a helium gas flow rate in each of the first and second introduction pipes 201 and 202.