X-Ray Fluorescence Spectrometry for High-Hydrogen Sample Analysis

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Solution Overview

Problem

Conventional X-ray fluorescence spectrometers using the fundamental parameter method struggle to accurately analyze samples containing a large amount of hydrogen due to errors in measurement intensities of scattered X-rays, leading to inaccuracies in elemental composition analysis.

Innovation Solution

An X-ray fluorescence spectrometer that utilizes a combination of shorter-wavelength and longer-wavelength scattered X-rays, along with Compton and Thomson scattered X-rays, to solve simultaneous difference equations, recalculating elemental contents and atomic numbers through successive approximations to match theoretical and measured intensities, thereby improving accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If Compton scattered X-rays and Thomson scattered X-rays of Rh-Kα are used to represent fluorescent X-rays for unmeasured elements, then the analysis can proceed with assumed hydrogen content and mean atomic number, but small errors in measured intensities of these scattered X-rays significantly affect the quantitative values of hydrogen content and mean atomic number, leading to increased errors in measured element contents

Engineering Contradiction:
Improveability to analyze samples with unmeasured elementsVSAvoidaccuracy of hydrogen content and mean atomic number quantification
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The patent divides the unmeasured elements into two distinct groups: hydrogen (with assumed content) and other unmeasured elements (with assumed mean atomic number). This segmentation allows independent optimization of measurement approaches for each group, reducing the propagation of errors in quantitative analysis.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent changes the measurement parameters by selecting scattered X-rays with specific wavelength ranges (0.05-0.075 nm and 0.11-0.23 nm) that are less sensitive to intensity measurement errors. This parameter optimization reduces the impact of small measurement errors on the calculated hydrogen content and mean atomic number.

Inventive Principle:
Principle #35Parameter changes

2Ease of operation

If a single type of scattered X-ray is used for unmeasured elements, then the measurement process is simplified, but the accuracy of determining hydrogen content and mean atomic number decreases due to error propagation

Engineering Contradiction:
Improvesimplicity of measurement processVSAvoidaccuracy of elemental composition analysis
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

The patent combines measurements of multiple types of scattered X-rays (Compton scattered X-rays and Thomson scattered X-rays) within specific wavelength ranges. This combination provides redundant information that compensates for measurement errors, improving the accuracy of hydrogen content and mean atomic number determination while maintaining operational simplicity through automated processing.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The spectrometer achieves precise analysis of samples with high hydrogen content by accurately determining elemental compositions and area densities, reducing errors associated with unmeasured elements.

Implementation Method 1

uses, in place of fluorescent X-rays, any one of Compton scattered X-rays of characteristic X-rays of primary X-rays

Methodology Applied
Scientific EffectCompton scattering: Compton Scattering

Implementation Method 2

Thomson scattered X-rays of the characteristic X-rays of the primary X-rays

Methodology Applied
Scientific EffectThomson scattering: Thompson Effect

Implementation Method 3

measure an intensity of fluorescent X-rays generated from each of elements in the sample

Methodology Applied
Scientific EffectX-ray fluorescence: Fluorescence

Data Source

PatentEP4425161B1X-ray fluorescence spectrometer
Publication Date: 2026.01.21 RIGAKU CORP
  • EP4425161B1 patent drawingFigure 1
  • EP4425161B1 patent drawingFigure 2
  • EP4425161B1 patent drawingFigure 3

AI summary

An X-ray fluorescence spectrometer according to the present invention includes a calculation unit (10) configured to calculate a content of each element in a sample (13) using an FP method, wherein the calculation unit (10) is configured to: in order to take into consideration an influence of unmeasured elements for which the fluorescent X-rays are not measured, use shorter-wavelength scattered X-rays of primary X-rays having a wavelength of 0.05 nm or more and 0.075 nm or less, and longer-wavelength scattered X-rays of the primary X-rays having a wavelength of 0.11 nm or more and 0.23 nm or less as scattered X-rays whose intensities are measured by a detection unit (9), assume a mean atomic number for elements other than hydrogen included in the unmeasured elements, and assume a content for hydrogen.