Wavelength Dispersive X-Ray Fluorescence Spectrometer Detector Positioning

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Solution Overview

Problem

Conventional wavelength dispersive X-ray fluorescence spectrometers with focusing optical systems face complexity in structure, high costs, and decreased measurement accuracy due to lower background sensitivity and the need for complicated analysis conditions, which hinder high-precision quantitative and principal component analysis at high counting rates.

Innovation Solution

A wavelength dispersive X-ray fluorescence spectrometer with a focusing optical system featuring a single one-dimensional detector and a detector position change mechanism that allows the detector to be set at either a parallel or intersection position, enabling accurate net intensity measurement and high counting rates through simultaneous peak and background intensity detection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a receiving slit with multiple openings is used to measure background intensity in adjacent area, then background measurement is enabled, but sensitivity decreases and measurement accuracy deteriorates

Engineering Contradiction:
Improvebackground measurement capabilityVSAvoidbackground sensitivity
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

The receiving slit is divided into multiple openings (first opening for peak area, second opening for background area) that can be selectively activated. This segmentation allows the system to measure both peak intensity and background intensity simultaneously using a single detector, resolving the contradiction between enabling background measurement and maintaining high sensitivity.

Inventive Principle:
Principle #1Segmentation

2Measurement precision

If multiple spectroscopic devices are provided to measure peak and background separately, then measurement accuracy improves, but device complexity and cost increase

Engineering Contradiction:
Improvepeak and background measurement accuracyVSAvoidnumber of spectroscopic devices
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

A single spectroscopic device is designed to perform multiple functions: it can measure both peak intensity and background intensity by switching between different openings in the receiving slit. This multi-functionality eliminates the need for separate spectroscopic devices for peak and background measurement, reducing system complexity while maintaining measurement accuracy.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

An optical path selection unit (beam splitter or switch) is introduced as an intermediary component to direct secondary X-rays to different openings in the receiving slit. This intermediary mechanism enables a single detector to access both peak and background regions, achieving accurate measurements without requiring multiple spectroscopic devices.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If attenuator is used to decrease fluorescent X-ray intensity for high-counting-rate samples, then counting linearity is maintained, but measurement time increases and productivity decreases

Engineering Contradiction:
Improvecounting linearityVSAvoidmeasurement speed
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The system is pre-configured with multiple openings in the receiving slit, where the first opening is optimized for high-counting-rate measurements and the second opening is optimized for background measurements. This preliminary arrangement allows the system to handle high-counting-rate samples directly without requiring attenuators, maintaining counting linearity while preserving measurement speed.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for high-precision quantitative analysis at high speed and high-precision principal component analysis with a simple structure, overcoming the limitations of lower background sensitivity and complexity in existing systems.

Implementation Method 1

a spectroscopic device configured to monochromate and focus the secondary X-rays that have passed through the divergence slit

Methodology Applied
Scientific EffectMonochromating: Diffraction

Implementation Method 2

a spectroscopic device configured to monochromate and focus the secondary X-rays that have passed through the divergence slit

Methodology Applied
Scientific EffectFocusing: Focusing

Implementation Method 3

a single one-dimensional detector having a plurality of detection elements arranged linearly and having a receiving surface perpendicular to an optical axis of focused secondary X-rays

Methodology Applied
Scientific EffectX-ray detection: Photoelectric Effect

Data Source

PatentEP3521813B1Wavelength dispersive x-ray fluorescence spectrometer
Publication Date: 2022.12.07 RIGAKU CORP
  • EP3521813B1 patent drawingFigure 1
  • EP3521813B1 patent drawingFigure 2~3
  • EP3521813B1 patent drawingFigure 4~5

AI summary

A wavelength dispersive X-ray fluorescence spectrometer includes a single one-dimensional detector (10) having detection elements (7) arranged linearly, and includes a detector position change mechanism (11) for setting a position of the one-dimensional detector (10) to either a parallel position at which an arrangement direction of the detection elements (7) is parallel to a spectral angle direction of a spectroscopic device (6) or an intersection position at which the arrangement direction intersects the spectral angle direction. At the parallel position, a receiving surface of the one-dimensional detector (10) is located at a focal point of focused secondary X-rays (42). At the intersection position, a receiving slit (9) is disposed at the focal point of the focused secondary X-rays (42), and the receiving surface is located at a traveling direction side of the focused secondary X-rays (42) farther from the spectroscopic device (6) than the receiving slit (9).