X-ray Fluorescence Analyzer Background Correction Mechanism

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Solution Overview

Problem

Current X-ray fluorescence spectrometers require lengthy measurement times for high-accuracy analysis due to the need to individually measure peak and background intensities, and struggle to accurately remove background intensity with low sensitivity, especially when scanning over wide energy ranges.

Innovation Solution

An X-ray fluorescence spectrometer with a retracting mechanism for the spectroscopic device, a scanning mechanism to move the energy-dispersive detector between auxiliary and main measurement areas, and an arithmetic device for calculating and correcting background intensity using pre-stored ratios between undispersed and dispersed secondary X-rays, allowing for prompt high-accuracy analysis.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the spectroscopic device and energy-dispersive detector are both mounted in a wavelength-dispersive spectrometer to enable both wave dispersive and energy dispersive measurements, then the spectrometer can perform both types of analysis, but the device configuration becomes complex

Engineering Contradiction:
Improvecapability to perform both wave dispersive and energy dispersive measurementsVSAvoidinstrument configuration complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent merges the wavelength-dispersive and energy-dispersive measurement capabilities into a single integrated system. The energy-dispersive detector is positioned to receive both dispersed and undispersed secondary X-rays, allowing both measurement modes to be performed with one detector system rather than requiring separate detectors for each mode.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The energy-dispersive detector is designed to serve multiple functions: it can measure both dispersed secondary X-rays (for wavelength-dispersive analysis) and undispersed secondary X-rays (for energy-dispersive analysis). This multi-functional detector eliminates the need for separate specialized detectors for each measurement type.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Measurement precision

If the spectrometer measures dispersed secondary X-rays over wide energy ranges to remove background intensity accurately, then the background removal precision is improved, but the measurement time increases significantly

Engineering Contradiction:
Improvebackground intensity removal accuracyVSAvoidmeasurement time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent performs preliminary measurement of undispersed secondary X-rays to obtain background intensity information before performing the actual analysis measurement. The background intensity ratio obtained from this preliminary measurement is then used to correct the peak intensity measurements, eliminating the need for time-consuming post-peak background measurements.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The undispersed secondary X-rays serve as an intermediary to obtain background intensity information. By measuring the undispersed X-rays and calculating the background intensity ratio, the system indirectly obtains background information without requiring direct measurement of dispersed X-rays over wide energy ranges, thus reducing measurement time.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Productivity

If the energy-dispersive detector directly measures secondary X-rays without dispersing them, then the measurement speed is improved, but the background intensity cannot be accurately separated from peak intensity

Engineering Contradiction:
Improvemeasurement speedVSAvoidbackground and peak intensity separation accuracy
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The system uses feedback from the undispersed secondary X-ray measurements to correct the dispersed X-ray measurements. The background intensity ratio obtained from undispersed X-rays is fed back to correct the peak intensity values in the dispersed X-ray spectrum, enabling accurate background removal without sacrificing measurement speed.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables rapid and accurate high-accuracy analysis by pre-storing the background intensity ratios, simplifying the instrument configuration and reducing measurement time by eliminating the need to measure dispersed secondary X-rays over wide energy ranges.

Implementation Method 1

An X-ray fluorescence spectrometer has been known as an instrument for measuring elements contained in a sample and the concentration of the elements. The X-ray fluorescence spectrometer is configured to detect fluorescent X-rays emitted from a sample when the sample is irradiated with X-rays

Methodology Applied
Scientific EffectX-ray fluorescence: Fluorescence

Implementation Method 2

the wavelength-dispersive X-ray fluorescence spectrometer is configured to disperse X-rays using a spectroscopic device for each element

Methodology Applied
Scientific EffectX-ray diffraction: Diffraction

Data Source

PatentEP3550293B1X-ray fluorescence analyzer
Publication Date: 2021.06.30 RIGAKU CORP
  • EP3550293B1 patent drawingFigure 1
  • EP3550293B1 patent drawingFigure 2
  • EP3550293B1 patent drawingFigure 3

AI summary

Provided is an X-ray fluorescence spectrometer, which has a simple structure, and is capable of promptly performing high-accuracy analysis. The X-ray fluorescence spectrometer according to the present invention includes: an X-ray source (100) configured to irradiate a sample (103) with primary X-rays; a spectroscopic device (120) configured to disperse secondary X-rays emitted from the sample (103); an energy-dispersive detector (110) configured to measure an intensity of the secondary X-rays; a retracting mechanism (108) configured to retract the spectroscopic device (120) from a path of the secondary X-rays; a scanning mechanism (114), which is configured to continuously move the detector (110) between an auxiliary measurement area (124) for measuring the secondary X-rays in a state where the spectroscopic device (120) is retracted and a main measurement area (122) for measuring the dispersed secondary X-rays; a storage device (116) configured to store, in advance, a ratio between a background intensity measured in the auxiliary measurement area (124) and a background intensity measured in the main measurement area (122); and an arithmetic device (118) configured to perform correction and quantitative analysis, the correction including subtracting a value, which is obtained by multiplying the background intensity in the auxiliary measurement area (124) by the ratio, from a measured intensity in the main measurement area (122).