X-ray Fluorescence Spectrometer Measurement Line Evaluation
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Solution Overview
Problem
Conventional X-ray fluorescence spectrometers face challenges in accurately analyzing thin film samples, particularly when the same elements are present in different layers, leading to incorrect determination of analysis possibilities due to the dependence of measurement line intensities on both thickness and composition.
Innovation Solution
An X-ray fluorescence spectrometer that calculates estimated measured intensities for all specified measurement lines, changes one measurement line's intensity by a predetermined amount, and uses the fundamental parameter method to obtain quantitative values of composition and thickness, estimating quantitative errors and determining analysis possibilities based on these values, thereby facilitating the selection of appropriate measurement lines.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If conventional measurement line evaluation methods are used that calculate theoretical intensities by changing only thickness or composition by a predetermined amount, then the evaluation process is simple, but the determination of analysis possibility becomes incorrect when the same elements are contained in different layers
Solution Approach 1:
The invention changes the evaluation approach from varying thickness or composition by fixed predetermined amounts to varying them by actual measurement precision amounts. The measurement line evaluation unit now calculates theoretical intensities using actual thickness precision and composition precision values, which dynamically adjust based on the specific sample conditions and measurement lines being evaluated. This resolves the contradiction by making the evaluation both accurate (using real precision values) and adaptable to different scenarios.
Solution Approach 2:
The system implements feedback by using the calculated quantitative values and their precisions to determine analysis possibility. The measurement line evaluation unit continuously refines the evaluation by comparing theoretical intensities with actual measurements, adjusting the determination of whether a measurement line is suitable based on whether the calculated precision meets required thresholds. This feedback loop ensures accurate determination while maintaining operational simplicity through automated decision-making.
2Loss of time
If measurement lines are selected without considering the interdependence of thickness and composition on intensity, then the selection process is quick, but accurate analysis cannot be performed when both composition and thickness are analyzed
Solution Approach 1:
The invention applies preliminary action by having the measurement line evaluation unit pre-calculate theoretical intensities for all candidate measurement lines using the fundamental parameter method, considering the interdependence of thickness and composition. This pre-evaluation allows operators to quickly identify suitable measurement lines without time-consuming trial measurements, while ensuring accuracy through comprehensive theoretical analysis of how thickness and composition changes affect each measurement line's intensity.
Solution Approach 2:
The system dynamically adjusts the evaluation criteria based on the specific sample conditions. When both composition and thickness need to be analyzed, the measurement line evaluation unit modifies the theoretical intensity calculations to account for the coupled effects of parameter changes. This allows rapid identification of measurement lines that remain stable or provide complementary information, resolving the contradiction between quick selection and accurate analysis.
3Device complexity
If the intensity of measurement lines is assumed to depend on only one parameter (thickness or composition), then the calculation model is simple, but quantitative error estimation becomes inaccurate when both parameters affect intensity
Solution Approach 1:
The invention transitions from single-parameter to multi-parameter modeling by implementing a calculation system that simultaneously considers variations in both thickness and composition. The measurement line evaluation unit calculates theoretical intensities by varying both parameters within their respective precision ranges, capturing their interdependent effects on measurement line intensities. This comprehensive approach maintains reasonable computational complexity while dramatically improving quantitative error estimation accuracy for samples where both parameters are analyzed.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate analysis by automatically selecting optimal measurement lines and determining analysis possibilities, even in cases where the same elements are contained in different layers, improving the accuracy of thin film analysis.
Implementation Method 1
X-ray fluorescence analysis, secondary X-rays to be measured
Implementation Method 2
irradiates, with primary X-rays, a sample having a single-layer or multi-layer thin film
Data Source
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AI summary
A measurement line evaluation unit (23): calculates, for all of specified measurement lines, estimated measured intensities by theoretical calculation on the basis of a composition and/or a thickness specified for a thin film; changes, by a predetermined amount, only an estimated measured intensity of one measurement line, and obtains quantitative values of the composition and/or the thickness of the thin film after change of the estimated measured intensity, for each changed measurement line, by a fundamental parameter method; and estimates a quantitative error and/or determines possibility of analysis, on the basis of the obtained quantitative values and the specified composition and/or the specified thickness.