Grazing Incidence XRF Spectrometer Slit Mechanism
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Solution Overview
Problem
Conventional X-ray fluorescence spectrometers have complex structures due to multiple units required for adjusting X-ray sources and spectroscopic devices, leading to increased costs and complexity, which hinders high-sensitivity and high-accuracy analysis.
Innovation Solution
A grazing incidence X-ray fluorescence spectrometer with a bent spectroscopic device, a slit member, and a glancing angle setting unit that allows for automatic adjustment of the X-ray beam's angle, using a variable slit member and multilayer films to focus X-rays on a sample, enabling precise analysis with a low-cost, simple structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple units (X-ray source selection unit, X-ray source adjustment unit, spectroscopic device position adjustment unit) are provided to enable automatic adjustment and high sensitivity analysis, then analysis sensitivity and accuracy are improved, but device complexity and cost increase
Solution Approach 1:
The patent combines the functions of the slit member (which limits X-ray beam width) and the angle adjustment mechanism into a single integrated component. The slit member is moved by a simple moving unit to simultaneously achieve both beam width control and glancing angle adjustment, eliminating the need for separate X-ray source adjustment units and spectroscopic device position adjustment units, thus reducing device complexity while maintaining measurement precision
Solution Approach 2:
The slit member serves multiple functions: it limits the width of the X-ray beam, controls the focusing angle, and through its movement, adjusts the glancing angle. This multi-functional design replaces multiple specialized units, achieving high sensitivity and accuracy analysis without increasing device complexity
2Measurement precision
If multiple units are provided for automatic adjustment, then analysis accuracy is improved, but manufacturing cost increases
Solution Approach 1:
The patent extracts and eliminates unnecessary complex adjustment units from the system. By using the slit member's movement to achieve angle adjustment functionality, it removes the need for separate X-ray source adjustment units and spectroscopic device position adjustment units, thereby reducing manufacturing cost while maintaining analysis accuracy through the simplified structure
3Device complexity
If a simple structure is used to reduce cost, then device complexity is reduced, but achieving high sensitivity and accuracy becomes difficult
Solution Approach 1:
The patent achieves high sensitivity and accuracy analysis with a simple structure by precisely controlling the glancing angle parameter. The slit member is moved to set the glancing angle to an optimal value, and the beam width is controlled through the slit's positioning, enabling accurate analysis without complex multi-unit systems
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The spectrometer achieves high sensitivity and accuracy in elemental analysis and thin film thickness measurement with reduced complexity and cost, using a focused X-ray beam and adjustable glancing angle to optimize analysis conditions.
Implementation Method 1
a bent spectroscopic device configured to monochromate the X-rays emitted from the X-ray source and form an X-ray beam that is focused on a fixed position on a surface of a sample
Implementation Method 2
a slit member disposed between the bent spectroscopic device and the sample, the slit member having a linear opening by which a width of the passing X-ray beam is limited in a focusing angle direction
Implementation Method 3
a slit member moving unit configured to move the slit member in a direction that intersects the X-ray beam passing through the linear opening; a glancing angle setting unit configured to move the slit member by using the slit member moving unit, and set a glancing angle of the X-ray beam to a desired angle
Implementation Method 4
a detector configured to measure an intensity of fluorescent X-rays generated from the sample that is irradiated with the X-ray beam
Data Source
AI summary
A grazing incidence X-ray fluorescence spectrometer (1) of the present invention includes: a bent spectroscopic device (4) to monochromate X-rays (3) from an X-ray source (2) and generate an X-ray beam (5) focused on a fixed position (15) on a surface of a sample (S); a slit member (6) disposed between the bent spectroscopic device (4) and the sample (S) and having a linear opening (61); a slit member moving unit (7) to move the slit member (6) in a direction that intersects the X-ray beam (5) passing through the linear opening (61); a glancing angle setting unit (8) to move the slit member (6) by using the slit member moving unit (7), and set a glancing angle (α) of the X-ray beam (5) to a desired angle; and a detector (10) to measure an intensity of fluorescent X-rays (9) from the sample (S) irradiated with the X-ray beam (5).