XY Macro-Micro Motion Stage Decoupling for Precision Feedback
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Solution Overview
Problem
Existing XY macro-micro motion stages suffer from error accumulation due to multi-level series connections of driving and sensor components, limiting positioning accuracy and preventing full-stroke, closed-loop precision feedback, which hinders accurate position information acquisition and control implementation.
Innovation Solution
An XY macro-micro motion stage with a decoupling arrangement between X-direction and Y-direction motions, featuring a fine-adjusting assembly with micro-motion units connected through sliding pairs and a macro-driving assembly for coarse positioning, along with an XY position detecting device for precise positioning feedback control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If multi-level series connection of driving components and sensor components is used, then the structure can accommodate driving and sensor components, but error accumulation occurs which greatly influences positioning accuracy of the operating end
Solution Approach 1:
The motion stage is divided into independent macro-motion and micro-motion units with separate driving components (macro-driving unit and micro-driving unit) and separate sensor components (macro-motion sensor and micro-motion sensor). This segmentation eliminates the multi-level series connection that caused error accumulation, allowing each unit to be manufactured and calibrated independently while maintaining high positioning accuracy through their coordinated operation.
2Device complexity
If cross-arrangement coupling of driving components and sensor components is used, then the structure can integrate components, but full-stroke and closed-loop precision feedback of the operating end cannot be achieved
Solution Approach 1:
The sensor system is segmented into macro-motion sensor and micro-motion sensor, each independently coupled to their respective motion units. This allows full-stroke feedback from the macro sensor and precision feedback from the micro sensor to be obtained separately and combined, achieving complete closed-loop precision feedback that was impossible with cross-arrangement coupling.
Solution Approach 2:
The control device acts as an intermediary that receives feedback signals from both macro-motion sensor and micro-motion sensor, processes them separately according to their respective motion ranges and precision requirements, and generates appropriate control signals for the driving components, enabling full-stroke and precision feedback control.
3Manufacturing precision
If decoupling arrangement between X-direction and Y-direction motions is implemented, then accurate position detection on both axes is achieved without complex coordinate transformations, but the structure becomes more complex
Solution Approach 1:
The motion stage is segmented into independent X-direction and Y-direction motion units, each with its own driving component and sensor component. This segmentation creates a decoupled structure where X-motion and Y-motion are independently controlled and measured, eliminating the need for complex coordinate transformations while maintaining structural organization through modular design.
Data Source
AI summary
An XY macro-micro motion stage and a control method thereof based on end feedback. The XY macro-micro motion stage includes a fine-adjusting assembly, a macro-driving assembly and an XY position detecting device. The macro-driving assembly includes an X-direction macro-driving unit, a Y-direction macro-driving unit, an X-direction mounting plate and a Y-direction mounting plate. The XY position detecting device is configured to obtain its position on the X axis and Y axis.