XY Stage Device Yawing Angle Control via Segmented Support
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Solution Overview
Problem
Existing XY stage devices face challenges in controlling the yawing angle of the Y-axis movable body and maintaining the running precision of the X-axis movable body due to the attachment precision of rolling guides and thermal stress caused by temperature changes.
Innovation Solution
An XY stage device with a pair of actuators, a detector, and a controller that adjusts the driving of the actuators based on detected yawing angles, using a combination of rolling guides and air pads to support the Y-axis movable body, allowing for precise control of the yawing angle and reducing strain from thermal stress.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If both ends of the Y-axis movable body are supported by a pair of rolling guides, then the Y-axis movable body is completely constrained in the X-axis direction, but this causes strain in the Y-axis movable body due to thermal stress and makes it difficult to control the yawing angle
Solution Approach 1:
The support system for the Y-axis movable body is segmented into two different types: one rolling guide and one air pad. This segmentation allows each support to have different characteristics - the rolling guide provides stable constraint while the air pad reduces friction and thermal stress, thereby resolving the contradiction between constraint stability and yawing angle control precision
Solution Approach 2:
An air pad is introduced as one of the supporters for the Y-axis movable body. The air pad uses pneumatic pressure to provide support with minimal contact, reducing friction and thermal stress while maintaining stability. This pneumatic support element helps control the yawing angle by eliminating the harmful effects of complete mechanical constraint
2Stability of the object's composition
If both ends of the Y-axis movable body are supported by a pair of rolling guides, then the Y-axis movable body is completely constrained in the X-axis direction, but this causes strain due to thermal stress from temperature changes
Solution Approach 1:
The air pad uses pneumatic pressure to support the Y-axis movable body with minimal mechanical contact. This reduces the transmission of thermal stress through the support structure, as air is a poor conductor of heat and the pneumatic system can accommodate thermal expansion without creating strain
Solution Approach 2:
The support system changes from complete mechanical constraint to a hybrid mechanical-pneumatic support. This parameter change in the support mechanism reduces thermal stress by allowing slight movements and expansions without creating strain in the Y-axis movable body
3Stability of the object's composition
If both ends of the Y-axis movable body are supported by a pair of rolling guides, then the Y-axis movable body is completely constrained in the X-axis direction, but this deteriorates the running precision of the X-axis movable body
Solution Approach 1:
The support system is segmented into different types of supporters (rolling guide and air pad) to provide balanced support. This segmentation prevents complete constraint that would cause strain, thereby maintaining running precision of the X-axis movable body while still providing necessary stability
Solution Approach 2:
The air pad provides pneumatic support that reduces friction and mechanical constraint on the Y-axis movable body. This reduces strain and maintains the geometric accuracy of the XY stage, thereby preserving the running precision of the X-axis movable body
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables precise control of the yawing angle and enhances the running precision of the X-axis movable body by avoiding complete constraint in the X-axis direction, thus reducing thermal-induced strain and improving the stability and accuracy of the XY stage device.
Implementation Method 1
the other of the pair of supporters is an air pad which supports the Y-axis movable body in non-contact with the platen
Data Source
AI summary
An XY stage device having an X-axis movable body which moves in the X-axis direction on a platen, and a Y-axis movable body which moves in the Y-axis direction on the platen and guides the movement of the X-axis movable body in the X-axis direction. The XY stage device includes a pair of actuators which can be provided so as to be separated from each other in the X-axis direction, and drives the Y-axis movable body in the Y-axis direction, a detector which detects the yawing angle that can be the angle of the Y-axis movable body in a rotational direction around the Z-axis, a controller which controls the driving of the pair of actuators on the basis of the yawing angle detected by the detector, and a pair of supporters which supports the Y-axis movable body on the platen. One of the pair of supporters can be a rolling guide which guides the movement of the Y-axis movable body in the Y-axis direction, and the other of the pair of supporters can be an air pad which supports the Y-axis movable body in non-contact with the platen.