Configurable XY Table for Multi-Source Substrate Handling
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Solution Overview
Problem
Existing XY table systems in semiconductor and printing applications face challenges in efficiently handling and aligning substrates of varying properties, such as width, length, thickness, and chemical composition, particularly when switching between different substrate sources, which can lead to inefficiencies and downtime in production processes.
Innovation Solution
The implementation of a configurable XY table system that uses rollers and additional manipulators, controlled by a control unit, to move and register substrates in two orthogonal directions, allowing for automatic loading and unloading of substrates from multiple sources, including rolls and stacks, with the ability to switch between sources without shutting down the system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a single XY table system is designed for a particular substrate type, then it can handle that substrate efficiently, but it cannot accommodate substrates with varying properties without shutdown and reconfiguration
Solution Approach 1:
The XY table system is designed with universal substrate handling capabilities by incorporating multiple substrate sources (rolls and stacks), configurable rollers with adjustable friction properties, and manipulators that can accommodate different substrate types. The system can switch between handling rigid and flexible substrates, and between different substrate orientations without requiring shutdown or reconfiguration, making a single system serve multiple substrate handling functions
Solution Approach 2:
The system employs dynamic configuration capabilities where rollers can adjust their friction properties, manipulators can reposition themselves, and the XY table can accept substrates from multiple sources. This dynamic adaptability allows the system to optimize its configuration for each specific substrate type being processed while maintaining operational continuity
2Adaptability or versatility
If the system is designed to accommodate many different substrate types, then adaptability improves, but handling precision and alignment may deteriorate
Solution Approach 1:
The system applies different handling strategies to different parts of the substrate based on its properties. Rollers with specifically engineered friction properties contact specific regions of the substrate, manipulators are positioned at optimal locations for alignment, and the XY table provides localized support. This localized optimization ensures precise alignment and handling for each substrate type while maintaining overall system adaptability
Solution Approach 2:
The system incorporates feedback mechanisms that detect substrate properties and adjust handling parameters accordingly. Sensors monitor substrate position, orientation, and properties, and the control system automatically adjusts roller friction, manipulator positioning, and XY table configuration to maintain optimal alignment precision for each specific substrate type being processed
3Productivity
If manual reconfiguration is required when switching substrate sources, then system complexity is reduced, but production downtime increases
Solution Approach 1:
The system is designed to automatically reconfigure itself when switching between substrate sources. The manipulators automatically reposition, rollers automatically adjust their friction properties, and the XY table automatically accepts substrates from different sources without requiring manual intervention. This self-service capability eliminates production downtime associated with manual reconfiguration while maintaining manageable system complexity through automated control
Data Source
AI summary
A device, method and system for receiving and submitting a substrate, the device including an XY table, the XY table having one or a plurality of sides for accepting a substrate, a set of manipulators coupled to the XY table, the manipulators configured to accept and register the substrate from the one or plurality of sides of the XY table, and a set of retractable dividers on the XY table configurable to register one or a plurality of substrates concurrently.