Y2O3-ZrO2 Composite Coating for Plasma Chamber Corrosion Resistance
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Solution Overview
Problem
Conventional thermal spray coatings, such as Al2O3 and Y2O3, exhibit inadequate corrosion resistance in corrosive environments, particularly in Cl gas-containing plasma, leading to increased defect rates and reduced lifespan of equipment in semiconductor and display manufacturing.
Innovation Solution
A thermal spray coating material with a composition of Y2xZr1−xOx+2, where x ranges from 0.19 to 0.83, is developed, incorporating Al2O3 powder and prepared by mixing Y2O3 and ZrO powders with electrostatic charges, then heat-treated and spray-dried, followed by thermal spraying to form a coating film that enhances corrosion resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional thermal spray coatings (Al2O3, Y2O3) are used, then the coating process is simple and well-established, but the corrosion resistance in Cl gas-containing plasma is inadequate
Solution Approach 1:
The patent uses composite coating materials consisting of multiple ceramic powders (Al2O3, Y2O3, ZrO2) with specific weight ratios to achieve superior corrosion resistance in Cl gas-containing plasma environments. The composite nature of the coating material allows synergistic effects that improve reliability while managing complexity through defined composition ranges.
Solution Approach 2:
The patent optimizes specific parameters including the weight ratios of coating materials (Al2O3: 30-70%, Y2O3: 10-40%, ZrO2: 10-40%), powder particle size (5-45 μm), and coating thickness (5-20 μm) to achieve the desired corrosion resistance. By controlling these parameters within specific ranges, the patent resolves the contradiction between improved reliability and managed complexity.
2Manufacturing precision
If Al2O3 and Y2O3 coatings are applied through conventional thermal spray, then the manufacturing process is straightforward, but volumetric shrinkage and defects occur during coating formation
Solution Approach 1:
The patent controls powder particle size within 5-45 μm and coating thickness within 5-20 μm to minimize volumetric shrinkage and defects during thermal spray coating. These parameter optimizations improve manufacturing precision of the coating film while maintaining reasonable ease of manufacture through standardized thermal spray processes.
3Reliability
If the coating material composition is optimized for maximum corrosion resistance, then protection performance improves, but the manufacturing cost and material complexity increase
Solution Approach 1:
The patent defines specific weight ratio ranges for coating materials (Al2O3: 30-70%, Y2O3: 10-40%, ZrO2: 10-40%) that balance corrosion resistance performance with manufacturability. These parameter specifications allow for optimized protection performance while maintaining ease of manufacture through controlled material preparation procedures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The coating material significantly improves corrosion resistance under Cl gas-containing plasma, reducing etching rates and extending the lifespan of equipment by minimizing volumetric shrinkage and defects, thus offering superior protection in corrosive environments.
Implementation Method 1
preparing composite powder by mixing Y2O3 powder having a diameter of 0.1 to 30 μm and ZrO2 powder having a diameter of 0.1 to 30 μm
Implementation Method 2
injecting the thermal spray coating material into a thermal spray device and heating the thermal spray coating material
Implementation Method 3
forming a coating film by laminating the thermal spray coating material in a fully molten or semi-molten state on the surface of a base material
Data Source
AI summary
Disclosed are a thermal spray coating material which greatly improves corrosion resistance, as compared to conventional Al2O3 and Y2O3 crystalline coatings and Al—Y—O and Al—Zr—O amorphous thermal spray coatings, a production method of the coating material, and a coating method using the same. The thermal spray coating material has a chemical formula of Y2xZr1−xOx+2, where x ranges from 0.19 to 0.83, preferably from 0.35 to 0.69. Accordingly, it is possible to produce a coating material for use in a chamber of vacuum plasmas equipment or internal parts of the chamber can be produced, which improves the corrosion resistance of a protective coating film upon ceramic thermal spray coating and lengthens the lifespan of parts.