Y2O3-ZrO2 Composite Material for Semiconductor Apparatus
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Solution Overview
Problem
Conventional yttrium oxide-containing materials used in semiconductor manufacturing apparatus have inferior mechanical characteristics, such as low three-point bending strength and fracture toughness, leading to breakage during machining or use, which affects yield, handling, and reliability.
Innovation Solution
A composite material is developed by dissolving zirconium oxide (ZrO2) in yttrium oxide (Y2O3) and vice versa, with a zirconium oxide content between 5 to 60 mol %, and employing a sintering process at 1,400° C. to 1,850° C. followed by an annealing process at 1,200° C. to 1,500° C. with a controlled cooling rate, to enhance mechanical properties and corrosion resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional yttrium oxide-containing material is used to maintain corrosion resistance in semiconductor manufacturing apparatus, then corrosion resistance is improved, but mechanical characteristics (three-point bending strength and fracture toughness) deteriorate
Solution Approach 1:
The invention creates a composite material system where Y2O3 and ZrO2 form solid solutions with each other. The Y2O3-ZrO2 composite structure combines the corrosion resistance of Y2O3 with the mechanical strength of ZrO2, achieving both high corrosion resistance and high mechanical characteristics simultaneously.
Solution Approach 2:
The invention optimizes the compositional parameters by controlling the ZrO2 content within specific ranges (5-60 mol% in Y2O3, or 40-95 mol% ZrO2 with Y2O3 content 5-60 mol%). This parameter optimization balances the trade-off between corrosion resistance and mechanical strength, allowing the material to achieve both properties at high levels.
2Reliability
If higher proportion of yttrium oxide is used to improve corrosion resistance, then corrosion resistance is improved, but fracture toughness deteriorates
Solution Approach 1:
The invention establishes optimal compositional parameter ranges: Y2O3 content of 40-95 mol% with ZrO2 content of 5-60 mol%, or alternatively ZrO2 content of 40-95 mol% with Y2O3 content of 5-60 mol%. These parameter ranges optimize the balance between corrosion resistance (provided by Y2O3) and fracture toughness (provided by ZrO2), allowing simultaneous achievement of both properties.
Solution Approach 2:
The invention creates local solid solution structures where ZrO2 is dissolved in the Y2O3 matrix and Y2O3 is dissolved in the ZrO2 matrix, forming a heterogeneous composite structure at the micro level. This local quality variation allows different regions to contribute their superior properties (corrosion resistance from Y2O3-rich regions, fracture toughness from ZrO2-rich regions).
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The composite material exhibits improved mechanical characteristics, including increased three-point bending strength and fracture toughness, and maintains sufficient corrosion resistance, thereby enhancing yield, handling, and reliability when applied to semiconductor manufacturing apparatus components.
Implementation Method 1
an yttrium-oxide solid solution in which zirconium oxide (ZrO2) is dissolved in yttrium oxide (Y2O3) and a zirconium-oxide solid solution in which the yttrium oxide is dissolved in the zirconium oxide
Implementation Method 2
a sintering process at 1,400° C. to 1,850° C.
Implementation Method 3
an annealing process at 1,200° C. to 1,500° C. with a controlled cooling rate
Data Source
AI summary
There is provided a strengthened composite material that is able to improve yield, handling, and reliability when it is applied to members of semiconductor manufacturing apparatus. Five to 60 mol % ZrO2 is contained relative to Y2O3, and temperature after a sintering process is maintained between 1,200° C. to 1,500° C. for 5 minutes or longer or temperature falling speed to reach 1,200° C. is adjusted to 200° C./h or slower, thereby producing the composite material containing, as major crystalline phases, a Y2O3 solid solution in which ZrO2 is dissolved in Y2O3 and a ZrO2 solid solution in which Y2O3 is dissolved in ZrO2.