Micromechanical Yaw Rate Sensor Coupling Element
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Solution Overview
Problem
Conventional yaw rate sensors are sensitive to vibrations and external accelerations, and production-related deviations affect their vibration resistance.
Innovation Solution
The yaw rate sensor design includes a coupling element connecting Coriolis elements, allowing them to move in two perpendicular directions, with attachment to a substrate and specific spring configurations, which separates interfering natural frequencies from detection natural frequencies, reducing sensitivity to vibrations and external accelerations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional yaw rate sensor designs are used, then the sensor can detect yaw rate, but the sensor is sensitive to vibrations and external accelerations
Solution Approach 1:
The sensor is divided into two separate partial structures (first and second), each with its own Coriolis element and detection system. This segmentation allows independent optimization of each structure's vibration resistance while maintaining overall sensor functionality through their coupled operation.
Solution Approach 2:
The patent introduces a coupling element that connects the two Coriolis elements in a direction perpendicular to their primary oscillation plane. This adds a dimensional aspect to the structure that creates frequency separation, enabling the sensor to distinguish between detection signals and vibration interference more effectively.
2Ease of manufacture
If the sensor structure is simplified, then manufacturing is easier, but production-related deviations affect vibration resistance
Solution Approach 1:
The coupling element is designed with specific geometric parameters (length, cross-section, material properties) that determine the natural frequencies of the system. By carefully selecting these parameters, the patent ensures that interfering natural frequencies are separated from detection frequencies, making the sensor's vibration resistance less sensitive to production variations.
Solution Approach 2:
The sensor structure combines different material properties in the partial structures and coupling element to achieve optimal frequency separation while maintaining manufacturability. The use of spring elements with specific rigidity characteristics allows for tuning the system's dynamic response without requiring extremely tight manufacturing tolerances.
3Measurement precision
If the Coriolis elements are highly sensitive to detection, then yaw rate measurement is more accurate, but the sensor becomes more sensitive to interfering accelerations
Solution Approach 1:
The coupling element acts as an intermediary between the two Coriolis elements, transmitting mechanical coupling while allowing frequency separation. This intermediary structure enables the Coriolis elements to remain highly sensitive to yaw rate detection while the coupling mechanism filters out interfering acceleration signals by creating distinct natural frequency bands.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design significantly enhances the sensor's resistance to vibrations and insensitivity to interfering accelerations, minimizing mechanical crosstalk and maintaining accuracy despite production deviations.
Implementation Method 1
The first and the second Coriolis element are displaced by a Coriolis force
Implementation Method 2
via a first and second driving structure, excite the first and second partial structure into oscillation
Data Source
AI summary
In a yaw rate sensor with a substrate having a main extent plane and with a first and second partial structure disposed parallel to the main extent plane, the first partial structure includes a first driving structure and the second partial structure includes a second driving structure, the first and second partial structure being excitable by a driving device, via the first and second driving structure, into oscillation parallel to a first axis parallel to the main extent plane, the first partial structure having a first Coriolis element and the second partial structure having a second Coriolis element, the yaw rate sensor being characterized in that the first and second Coriolis elements are displaceable by a Coriolis force parallel to a second axis, which is perpendicular to the first axis, and parallel to a third axis, which is perpendicular to the first and second axis, the second axis extending parallel to the main extent plane, and the first Coriolis element being connected to the second Coriolis element via a coupling element.