Micromechanical Yaw Rate Sensor with Rocker Coupling
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Solution Overview
Problem
Existing micromechanical yaw rate sensors can only detect yaw rates perpendicular or parallel to the substrate surface, limiting their capability to measure both orientations simultaneously and requiring separate designs for each orientation.
Innovation Solution
A micromechanical structure with a rocker structure that indirectly couples first and second Coriolis elements, allowing Coriolis forces to induce torsional deflection, enabling the measurement of both yaw rates parallel and perpendicular to the main plane of extension using a single compact design.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If separate micromechanical structures are used for detecting yaw rates parallel and perpendicular to the substrate surface, then detection capability for each orientation is achieved, but device complexity and manufacturing cost increase
Solution Approach 1:
The patent combines two separate detection functions (yaw rate detection parallel to substrate and yaw rate detection perpendicular to substrate) into a single micromechanical structure. The first and second Coriolis elements are integrated with a common rocker structure, allowing both orientations to be measured simultaneously by one device rather than requiring two separate sensors.
Solution Approach 2:
The rocker structure serves multiple functions: it supports both the first Coriolis element (for detecting yaw rate parallel to substrate) and the second Coriolis element (for detecting yaw rate perpendicular to substrate). This multi-functional design allows a single structure to perform what previously required two separate structures.
2Adaptability or versatility
If separate micromechanical structures are used for detecting yaw rates parallel and perpendicular to the substrate surface, then detection capability is achieved, but wafer surface area and manufacturing cost increase
Solution Approach 1:
By merging the detection functions for both yaw rate orientations into a single integrated structure, the patent reduces the total wafer surface area required. Instead of allocating separate areas for two independent sensors, the combined structure occupies a more compact footprint on the substrate.
3Adaptability or versatility
If separate micromechanical structures are used for detecting yaw rates parallel and perpendicular to the substrate surface, then detection capability is achieved, but integration complexity increases
Solution Approach 1:
The patent simplifies integration by combining both detection functions into a single micromechanical structure that can be manufactured as one integrated unit using standard micromechanical processes. This eliminates the need to integrate two separate structures, reducing assembly steps and integration complexity.
4Device complexity
If a single micromechanical structure measures both yaw rate orientations, then device complexity is reduced, but measurement precision for both orientations simultaneously may be compromised
Solution Approach 1:
The patent segments the detection functions by assigning them to separate Coriolis elements (first and second Coriolis elements) that operate independently but are coupled to the same rocker structure. This segmentation allows each element to specialize in detecting one orientation while sharing the common rocker mechanism, maintaining measurement precision for both orientations simultaneously.
Solution Approach 2:
The patent employs fully differential determination for both yaw rate measurements, which provides an excessive level of measurement precision beyond what would be minimally required. This approach ensures that signal-to-noise ratio is optimized for both orientations even within the constraints of a single integrated structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables fully differential determination of both yaw rates with improved signal-to-noise ratio, reducing manufacturing costs and simplifying integration, while maintaining a cost-effective standard micromechanical manufacturing process.
Implementation Method 1
the first and second Coriolis elements being excited to a vibration which is parallel to the substrate surface. A yaw rate which is oriented parallel to the main plane of extension and perpendicular to the vibration of the Coriolis elements causes a Coriolis force perpendicular to the substate surface which acts on the Coriolis elements
Implementation Method 2
the rocker structure may be swiveled about a torsional axis which is parallel to a substrate surface... causes the rocker structure to undergo torsional deflection about the torsional axis
Implementation Method 3
detection means being provided via which a deflection of the Coriolis elements as the result of a Coriolis force may be detected in a second axis which is perpendicular to the first axis
Data Source
AI summary
A micromechanical yaw rate sensor includes a substrate having a main plane of extension and two Coriolis elements. The first Coriolis element may be driven to a first vibration along a second direction which is parallel to the main plane of extension. The second Coriolis element may be driven to a second vibration which is antiparallel to the first vibration. A first deflection of the first Coriolis element and a second deflection of the second Coriolis element, in each case along a first direction which is parallel to the main plane of extension and perpendicular to the second direction, may be detected. The micromechanical sensor also has a rocker element indirectly or directly coupled to the first Coriolis element and to the second Coriolis element, which rocker element has a torsional axis essentially parallel to the second direction.