Yellow Light Conversion for Low-520 nm Photolithography Lighting
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Solution Overview
Problem
Existing lighting devices for photolithographic applications are inefficient in suppressing wavelengths below 520 nm, as filters convert unwanted spectral components into heat rather than effectively managing them, leading to suboptimal performance in handling light-sensitive materials.
Innovation Solution
A yellow light emitting device comprising a blue or white LED light source combined with a color converter containing an organic fluorescent dye with a specific structural unit, which absorbs light and converts it to wavelengths above 520 nm, minimizing radiant power below 520 nm and enhancing luminous efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If filters are used to suppress wavelengths below 520 nm, then the safety for handling photoresist is improved, but the energy efficiency deteriorates because filters convert unwanted spectral components into heat
Solution Approach 1:
The patent converts the harmful short-wavelength light (below 520 nm) into useful yellow light (520-590 nm) through the fluorescent dye's photoluminescence effect. Instead of filtering and wasting the blue LED's output as heat, the color converter material absorbs the blue light and re-emits it as yellow light, turning an energy loss into a useful output that both illuminates the workspace and protects photoresist materials.
Solution Approach 2:
The patent changes the wavelength parameter of the emitted light from blue (400-480 nm) to yellow (520-590 nm) through the fluorescent dye. This parameter transformation allows the system to maintain high luminous efficiency while achieving the required spectral output for photolithographic applications, as the dye's emission spectrum is specifically designed to peak in the yellow region above 520 nm.
2Object-affected harmful factors
If conventional lighting devices with filters are used, then wavelengths below 520 nm are suppressed, but the luminous efficiency deteriorates
Solution Approach 1:
The patent converts the harmful short-wavelength light (below 520 nm) into useful yellow light (520-590 nm) through the fluorescent dye's photoluminescence effect. Instead of filtering and wasting the blue LED's output as heat, the color converter material absorbs the blue light and re-emits it as yellow light, turning an energy loss into a useful output that both illuminates the workspace and protects photoresist materials.
Solution Approach 2:
The patent changes the wavelength parameter of the emitted light from blue (400-480 nm) to yellow (520-590 nm) through the fluorescent dye. This parameter transformation allows the system to maintain high luminous efficiency while achieving the required spectral output for photolithographic applications, as the dye's emission spectrum is specifically designed to peak in the yellow region above 520 nm.
3Object-affected harmful factors
If filters are used to block short wavelengths, then photoresist protection is improved, but the device complexity increases
Solution Approach 1:
The patent merges the lighting function and the wavelength filtering function into a single integrated component - the fluorescent dye layer. The dye simultaneously converts blue light to yellow light and provides the spectral filtering needed for photoresist protection, eliminating the need for separate filter elements and simplifying the overall device structure while maintaining effective photoresist protection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves a high luminous efficiency of at least 80 lumen/watt and reduces radiant power below 520 nm to less than 1%, providing safer and more efficient lighting for handling light-sensitive materials in photolithography and other applications.
Implementation Method 1
a color converter comprising at least one organic fluorescent dye in a polymer matrix and wherein said at least one organic fluorescent dye comprises at least one structural unit of formula (I)... absorbs at least a part of the light emitted by the light source and emits light comprising a wavelength in the range from 520 to 590 nm
Data Source
AI summary
A yellow light emitting device may have a light source and a color converter wherein at most 1% of the total emitted radiant power of the yellow light emitting device is emitted in a wavelength range shorter than 520 nm, as well as the use of the yellow light emitting device.