Yttrium Stabilized Zirconia Thermal Barrier for Substrate Heater

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Solution Overview

Problem

Conventional substrate processing chambers experience inefficiencies due to significant thermal energy loss from heaters, leading to increased power consumption and the need for supplemental cooling, which raises costs and reduces manufacturing efficiency.

Innovation Solution

A thermal radiation barrier, comprising coatings, films, or foils with yttrium-containing materials like yttrium stabilized zirconium oxide, is applied to the heater's surfaces to reflect thermal energy and minimize heat transfer outside the disk-shaped body, improving thermal uniformity and reducing energy losses.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If conventional heaters are used without thermal barriers, then heating function is provided, but significant thermal energy is lost to chamber components and surroundings

Engineering Contradiction:

Improvethermal energy lossVSAvoidheater structure

Core Design Contradiction:

Loss of energyVSDevice complexity

Solution Approach 1:

The patent applies thin film coatings (such as ceramic coatings, metallic coatings, or composite coatings) to the heater surface to create a thermal radiation barrier. These thin films reflect thermal radiation back toward the substrate while maintaining the heater's structural integrity and heating function, thereby reducing thermal energy loss without significantly increasing device complexity.

Inventive Principle:

Principle #30Flexible shells and thin films

Solution Approach 2:

The patent employs composite material structures combining different layers with distinct thermal and optical properties. The composite coating system includes layers designed to reflect thermal radiation, transmit visible light for monitoring, and provide mechanical adhesion to the heater substrate, achieving energy efficiency through material composition rather than structural complexity.

Inventive Principle:

Principle #40Composite materials

2Temperature

If large amounts of energy are applied to the heating element, then substrate heating is achieved, but excessive heat is radiated to chamber components requiring supplemental cooling

Engineering Contradiction:

Improvesubstrate temperatureVSAvoidchamber component cooling energy

Core Design Contradiction:

TemperatureVSUse of energy by stationary object

Solution Approach 1:

The patent converts the harmful thermal radiation that would otherwise be wasted on chamber components into a beneficial reflected thermal energy source. The thermal barrier reflects radiation back toward the substrate, ensuring that the energy invested in heating is effectively utilized for its intended purpose rather than being lost to surrounding components that would require cooling.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The patent modifies the thermal radiation parameters of the heater surface by applying coatings with specific emissivity and reflectivity characteristics. These parameter changes enable the heater to maintain effective substrate heating while minimizing thermal energy transfer to chamber components, thereby reducing or eliminating the need for supplemental cooling systems.

Inventive Principle:

Principle #35Parameter changes

3Productivity

If thermal energy is radiated from heater surfaces, then heating function is maintained, but manufacturing efficiency is reduced and costs increase

Engineering Contradiction:

Improvemanufacturing efficiencyVSAvoidthermal energy loss

Core Design Contradiction:

ProductivityVSLoss of energy

Solution Approach 1:

The patent implements a thermal management system with feedback control that monitors thermal energy distribution and adjusts heating parameters accordingly. The thermal barrier provides consistent thermal reflection, creating a predictable thermal environment that enables precise process control and optimizes manufacturing efficiency by ensuring thermal energy is directed where needed.

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The thermal barrier enhances thermal uniformity by a factor of at least 2, reducing energy consumption and minimizing heating of peripheral chamber components, thereby improving process efficiency and reducing costs.

Implementation Method 1

The radiation barrier may be utilized to reflect thermal energy and/or minimize heat transfer outside of the disk-shaped body

Methodology Applied

Scientific EffectThermal radiation reflection: Reflection

Implementation Method 2

The coating, film, foil or sheet may include yttrium (Y) containing materials, such as yttrium stabilized zirconium oxide (ZrO2)

Methodology Applied

Scientific EffectThermal insulation: Thermal Insulation

Data Source

PatentUS10177014B2Thermal radiation barrier for substrate processing chamber components

Publication Date: 2019.01.08 APPLIED MATERIALS INC

AI summary

An apparatus for a substrate support heater and associated chamber components having reduced energy losses are provided. In one embodiment, a substrate support heater is provided. The substrate support heater includes a heater body having a first surface to receive a substrate and a second surface opposing the first surface, a heating element disposed in the heater body between the first surface and the second surface, and a thermal barrier disposed on the second surface of the heater body, wherein the thermal barrier comprises a first layer and a second layer disposed on the first layer.