Yttrium Fluoride Thermal Spraying Material for Plasma Erosion Resistance
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Solution Overview
Problem
As the degree of integration of semiconductor devices improves, there is a need for stricter controls to prevent contamination by particles, and existing thermally sprayed coating films on semiconductor device production apparatuses require further improvements in plasma erosion resistance, particularly in suppressing the occurrence of finer particles with diameters of 0.2 μm or less.
Innovation Solution
A thermal spraying material comprising composite particles of yttrium fluoride microparticles with high compressive strength, bound together to prevent oxidation and disintegration during thermal spraying, forming a compact thermally sprayed coating film with enhanced plasma erosion resistance by avoiding the formation of rare earth element oxides, which are typically sources of ultrafine particles.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If conventional thermal spraying materials are used, then coating films can be formed, but ultrafine particles are generated due to oxidation of rare earth element compounds during thermal spraying
Solution Approach 1:
The patent uses yttrium fluoride compound as thermal spraying material instead of conventional rare earth element oxides or hydroxides. Yttrium fluoride is chemically inert and does not oxidize during thermal spraying, thereby eliminating the generation of ultrafine particles while still forming effective coating films on semiconductor device production apparatuses
Solution Approach 2:
The patent changes the chemical composition parameter of the thermal spraying material from conventional rare earth element oxides/hydroxides to yttrium fluoride compound. This parameter change fundamentally alters the chemical behavior during thermal spraying, preventing oxidation reactions that generate ultrafine particles
2Reliability
If rare earth element-containing compounds are used to improve plasma erosion resistance, then erosion resistance is enhanced, but oxidation during thermal spraying produces rare earth element oxides that become particle sources
Solution Approach 1:
The patent selects yttrium fluoride compound as the thermal spraying material because it is chemically inert and resistant to oxidation. This eliminates the oxidation problem associated with conventional rare earth element compounds while maintaining plasma erosion resistance, as the yttrium fluoride forms a stable, non-oxidizing coating that resists plasma attack without generating particle contamination
3Manufacturing precision
If stricter particle control is implemented, then contamination is reduced, but existing coating films continue to generate fine particles due to oxidation
Solution Approach 1:
The patent employs yttrium fluoride compound which is chemically inert and does not oxidize during thermal spraying or subsequent processing. This eliminates the source of fine particle generation, enabling stricter particle control and reducing contamination in semiconductor device production environments
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The thermal spraying material effectively suppresses the formation of ultrafine particles and enhances plasma erosion resistance, ensuring a compact and durable thermally sprayed coating film that maintains the yttrium fluoride composition and prevents oxidation, thereby improving the resistance to halogen gas plasma erosion.
Implementation Method 1
composite particles formed by a plurality of yttrium fluoride microparticles being integrated... having a compressive strength of 5 MPa or more
Implementation Method 2
use, as the thermal spraying material, a compound that is unlikely to form a rare earth element oxide in a thermal spraying environment... suppress oxidation of the thermal spraying material during thermal spraying
Implementation Method 3
thermal spraying methods, in which thermal spraying particles comprising a material such as a ceramic are blown in a softened or molten state onto a base material surface by means of combustion, electrical energy, or the like
Implementation Method 4
members of semiconductor device production apparatuses that were exposed to eroding plasma of oxygen gas, halogen gases, and the like, were provided with ceramic thermally sprayed coating films that were resistant to erosion by plasma
Data Source
AI summary
Provided is a thermal spraying material capable of forming a thermally sprayed coating film having improved plasma erosion resistance. The invention disclosed here provides a thermal spraying material. This thermal spraying material comprises composite particles in which a plurality of yttrium fluoride microparticles are integrated. In addition, the compressive strength of the composite particles is 5 MPa or more.