Yttrium-Inclusive Nitrided Dielectric Layer for Low-E Coating Thermal Stability

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Solution Overview

Problem

Conventional low-E coatings using titanium oxide dielectric layers are not thermally stable after heat treatment, leading to thermal stress and deteriorated performance, and have low deposition rates, resulting in high production costs.

Innovation Solution

The use of yttrium inclusive high index nitrided dielectric layers such as YZrSiAlN, YZrSiN, and YSiN, which are heat treatable and can be deposited at higher rates, providing high refractive index and low absorption, thus replacing TiO2 layers in low-E coatings for improved thermal stability and cost-effectiveness.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If titanium oxide dielectric layers are used in low-E coatings, then high refractive index is achieved for antireflection purposes, but thermal stability deteriorates after heat treatment due to film crystallization

Engineering Contradiction:
Improverefractive indexVSAvoidthermal stability
Core Design Contradiction:
Illumination intensityVSStability of the object's composition

Solution Approach 1:

The patent changes the material composition parameters by replacing TiO2 with nitrided dielectric layers containing Y, Zr, Si, and Al. This compositional parameter change maintains high refractive index while achieving thermal stability through the formation of crystalline phases like Y3Nb5O14 and ZrSiO4 that resist detrimental crystallization during heat treatment.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite dielectric layers combining multiple elements (Y, Zr, Si, Al, N, O) to create a material system that integrates both high refractive index properties and thermal stability. The composite nature allows synergistic effects where different elements contribute to optical properties while forming stable crystalline structures for thermal resistance.

Inventive Principle:
Principle #40Composite materials

2Illumination intensity

If titanium oxide dielectric layers are used in low-E coatings, then high refractive index is achieved, but deposition rate decreases leading to high production costs

Engineering Contradiction:
Improverefractive indexVSAvoiddeposition rate
Core Design Contradiction:
Illumination intensityVSProductivity

Solution Approach 1:

The patent modifies the deposition process parameters and material composition to achieve higher deposition rates. The nitrided dielectric layer formulation with Y, Zr, Si, and Al enables faster sputter deposition while maintaining the required high refractive index, directly improving production efficiency and reducing costs.

Inventive Principle:
Principle #35Parameter changes

3Illumination intensity

If titanium oxide dielectric layers are used in low-E coatings, then antireflection is achieved, but thermal stress increases causing deterioration of low E stack performance

Engineering Contradiction:
Improveantireflection performanceVSAvoidthermal stress
Core Design Contradiction:
Illumination intensityVSStress or pressure

Solution Approach 1:

The patent changes the material composition to nitrided dielectric layers with specific elemental ratios (Y, Zr, Si, Al, N, O) that maintain antireflection performance through high refractive index while simultaneously reducing thermal stress. The resulting crystalline phases have lower thermal stress and better adhesion to adjacent layers, preserving low E stack performance after heat treatment.

Inventive Principle:
Principle #35Parameter changes

4Illumination intensity

If conventional TiO2 dielectric layers are used, then high refractive index is achieved, but adhesion to adjacent layers deteriorates after heat treatment

Engineering Contradiction:
Improverefractive indexVSAvoidadhesion
Core Design Contradiction:
Illumination intensityVSStrength

Solution Approach 1:

The patent modifies the dielectric layer composition to include Y, Zr, Si, and Al in specific ratios, creating a material that maintains high refractive index while developing superior adhesion properties. The nitrided structure and resulting crystalline phases (Y3Nb5O14, ZrSiO4) provide enhanced bonding to adjacent low E layers, preventing delamination after heat treatment.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The yttrium inclusive nitrided dielectric layers maintain refractive index stability during heat treatment and offer higher deposition rates, enhancing the thermal stability and performance of low-E coatings in window applications while reducing production costs.

Implementation Method 1

these materials can be sputter-deposited at much higher sputter-deposition rates than can TiO2

Methodology Applied
Scientific EffectSputter-deposition: Sputtering

Implementation Method 2

a transparent dielectric high index layer, with a high refractive index (n) and low k value

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 3

low absorption (low k value, measured at 400 nm)

Methodology Applied
Scientific EffectAbsorption (EM radiation): Absorption (EM radiation)

Implementation Method 4

heat treatment (HT), and can be sputter-deposited at much higher sputter-deposition rates than can TiO2. These materials have also been found to be heat stable (e.g., the variation of refractive index n may be no greater than 0.1 due to HT such as thermal tempering at about 650° C.)

Methodology Applied
Scientific EffectHeat treatment: Heat Treatment

Data Source

PatentUS10287673B2Coated article having low-E coating with IR reflecting layer(S) and yttrium inclusive high index nitrided dielectric layer
Publication Date: 2019.05.14 INTERMOLECULAR INC
  • US10287673B2 patent drawing
  • US10287673B2 patent drawing
  • US10287673B2 patent drawing

AI summary

A coated article includes a low emissivity (low-E) coating having at least one infrared (IR) reflecting layer of a material such as silver, gold, or the like, and at least one yttrium (Y) inclusive high index nitrided dielectric layer. In certain example embodiments, the yttrium inclusive high index nitrided dielectric layer(s) may be of or include one or more of YZrSiAlN, YZrSiN, YSiN, and/or YSiAlN. The high index layer may be a transparent dielectric high index layer, with a high refractive index (n) and low k value, in preferred embodiments and may be provided for antireflection purposes and/or visible transmission purposes, and/or for improving thermal stability. In certain example embodiments, the low-E coating may be used in applications such as monolithic or insulating glass (IG) window units, vehicle windows, or the like.