Yttrium Oxide Coating via Impact Sintering for Plasma Etching
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Solution Overview
Problem
Thermally sprayed yttrium oxide and aluminum oxide coatings on plasma etching apparatus components are prone to microcracks, residual strains, and high surface roughness, leading to particle generation, reduced product yields, and increased maintenance costs due to brittleness and defects in semiconductor manufacturing.
Innovation Solution
An yttrium oxide coating formed by the impact sintering process, which eliminates internal defects and microcracks, providing high corrosion resistance and strength, and is composed of both particulate and non-particulate portions with controlled crystal structures to enhance film density and bonding.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If thermal spraying process is used to form yttrium oxide or aluminum oxide coating, then the coating provides plasma resistance and corrosion resistance, but the coating contains microcracks and residual strains leading to particle generation
Solution Approach 1:
The invention changes the fundamental parameters of the coating process from thermal spraying to impact sintering. This involves changing the temperature regime (from melting to non-melting), particle velocity (to hypervelocity range), and bonding mechanism (from thermal bonding to mechanical interlocking and cold welding). These parameter changes eliminate microcracks and residual strains while maintaining plasma resistance.
Solution Approach 2:
The invention replaces the thermal field-dominated thermal spraying process with a mechanical field-dominated impact sintering process. Instead of using thermal energy to melt and deposit particles, the invention uses mechanical kinetic energy to accelerate particles to hypervelocity, creating dense coatings through impact bonding without thermal cycles that cause microcracks.
2Ease of manufacture
If thermal spraying process is used to form coating, then the coating can be applied to base material, but the coating surface has high roughness and internal defects
Solution Approach 1:
The invention changes the deposition parameters by eliminating the melting and cooling cycle inherent in thermal spraying. By maintaining particles in a solid state and using hypervelocity impact for bonding, the process achieves smooth surfaces without the crater-like defects and roughness characteristic of thermally sprayed coatings.
Solution Approach 2:
The invention performs preliminary acceleration of particles to hypervelocity before impact, ensuring that particles are properly oriented and densely packed upon deposition. This preliminary kinetic energy input prevents the formation of voids and rough surfaces that occur when particles are simply melted and splattered in thermal spraying.
3Strength
If conventional thermal spraying coating is used, then the coating can protect base material, but the coating is brittle and prone to peeling
Solution Approach 1:
The invention replaces thermal bonding mechanisms with mechanical impact bonding. The hypervelocity particles embed themselves into the substrate and previously deposited layers through plastic deformation and cold welding, creating a metallurgical bond without thermal cycles. This eliminates the brittleness and peeling associated with thermally bonded coatings.
Solution Approach 2:
The invention creates a composite structure where yttrium oxide particles are densely packed and mechanically interlocked with the substrate and each other. The impact sintering process creates a gradient structure with strong bonding at the substrate interface and dense particle packing throughout, improving overall coating integrity and resistance to peeling.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The impact sintering process results in a stable, high-density yttrium oxide coating that effectively reduces particle generation and peeling, improving the lifespan and productivity of plasma etching apparatus components while maintaining high film strength and corrosion resistance.
Implementation Method 1
an yttrium oxide coating formed by an impact sintering process and configured to cover a surface of the base material
Data Source
AI summary
The present invention provides a plasma etching apparatus component 1 includes a base material 10 and an yttrium oxide coating 20 formed by an impact sintering process and configured to cover a surface of the base material. The yttrium oxide coating 20 contains at least one of particulate portions and non-particulate portions. The yttrium oxide coating 20 has a film thickness of 10 μm or above and a film density of 90% or above. The particulate portions have an area coverage ratio of 0 to 80% and the non-particulate portions have an area coverage ratio of 20 to 100%.