Yttrium Oxyfluoride Surface Layer Adhesion via Chromium Mediator
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Solution Overview
Problem
Yttrium oxyflouride (Y—O—F) surface layers formed by aerosol deposition have poor adhesion to base materials due to low fracture toughness, leading to separation issues during plasma exposure.
Innovation Solution
A surface layer with a Y—O—F particle size of 10 nm to 100 nm and a rhombohedral crystal structure, combined with an interface layer containing fluorine, is applied to the base material using a nozzle with a particle incident angle of ≤30 degrees, enhancing adhesion and plasma tolerance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If Y—O—F particles are deposited by aerosol deposition to form a surface layer, then plasma tolerance is improved, but adhesion to the base material deteriorates due to low fracture toughness
Solution Approach 1:
A chromium-containing intermediate layer is introduced between the Y—O—F surface layer and the base material structure. This intermediate layer acts as a mediator that improves adhesion by providing a transition zone with compatible mechanical properties, preventing direct contact between the brittle Y—O—F particles and the base material while maintaining plasma tolerance at the outer surface.
Solution Approach 2:
The structure is designed as a composite system consisting of three distinct layers: the Y—O—F surface layer for plasma tolerance, the chromium-containing intermediate layer for adhesion enhancement, and the base material structure. This composite approach allows each layer to fulfill its specific function, resolving the contradiction between plasma tolerance and adhesion.
2Reliability
If Y—O—F particles are spouted onto the base material structure, then plasma tolerance is achieved, but green compact forms that easily separate due to low fracture toughness
Solution Approach 1:
The chromium-containing intermediate layer serves as a stabilizing intermediary that prevents green compact formation by providing a bonding interface. This intermediate layer has appropriate fracture toughness to bridge the gap between the deposited Y—O—F particles and the base material, preventing easy separation while maintaining the plasma-tolerant surface composition.
Solution Approach 2:
The introduction of chromium and control of deposition parameters (particle size, deposition temperature, layer thickness) changes the physical and chemical parameters of the interface region. These parameter changes enhance the bonding strength and structural stability, preventing green compact formation while preserving the plasma tolerance property of the Y—O—F surface layer.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution stabilizes the surface layer on the base material, improving adhesion and maintaining plasma tolerance, as evidenced by increased X-ray diffraction peak intensity ratios and porosity ≤2%, resulting in a dense and stable film.
Implementation Method 1
a surface layer having good plasma tolerance on a base material structure... formed directly on a base material structure by an aerosol deposition process
Implementation Method 2
Fluorine may move near an interface between the surface layer and the base material structure, and atoms may be mixed therein
Implementation Method 3
an X-ray diffraction peak intensity ratio of a (1 5 1) plane with respect to a (1 0 0) plane of the surface layer
Data Source
AI summary
A member includes a base material structure and a surface layer on the base material structure. The surface layer includes a particle that includes Y—O—F. The base material structure includes interface layers in contact with the surface layer. The interface layers of the base material structure include fluorine.