Yttrium-Based Thermal Spray Coating Black Spot Prevention
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Yttrium-based thermal spray coatings often exhibit color irregularities, including black spots, due to deoxidation during the thermal spraying process, leading to reduced plasma resistance and increased etching rates, which complicates the manufacturing of semiconductor devices.
Innovation Solution
A yttrium-based thermal spraying powder with a controlled amount of SiO2 oxide additive, ensuring the coating's density and mechanical properties are enhanced while preventing black spots and allowing for color control, forming a high-density coating with specific chromaticity values and photoluminescence peaks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional yttrium-based thermal spray coating is performed, then coating formation is achieved, but black spots and color irregularities occur due to deoxidation
Solution Approach 1:
The patent applies preliminary action by adding SiO2 oxide additive to the yttrium-based powder before thermal spraying. This additive preemptively prevents deoxidation during the spraying process by providing oxygen supply, thereby preventing black spots and color irregularities before they can form in the coating.
Solution Approach 2:
The SiO2 oxide additive acts as an intermediary substance between the yttrium-based compound and the external environment. It mediates the oxidation process by providing controlled oxygen release during thermal spraying, preventing direct deoxidation of the yttrium-based compound that would otherwise cause black spots.
2Reliability
If thermal spray coating is performed to protect chamber parts, then corrosion resistance is improved, but particle generation increases due to coating deterioration
Solution Approach 1:
The patent uses composite materials by combining yttrium-based compound with SiO2 oxide additive to create a composite thermal spray powder. This composite structure provides both corrosion resistance from the yttrium-based compound and particle resistance from the SiO2 additive, reducing coating deterioration and particle generation in plasma environments.
Solution Approach 2:
The patent applies parameter changes by modifying the chemical composition of the thermal spray powder through SiO2 addition. This changes the coating's chemical stability and resistance properties, making it more resistant to plasma-induced deterioration and particle generation while maintaining corrosion protection.
3Reliability
If high density coating is formed to reduce etching rate, then plasma resistance improves, but manufacturing complexity increases
Solution Approach 1:
The patent applies parameter changes by modifying the powder composition with SiO2 additive, which simplifies the manufacturing process while achieving high density coatings. The SiO2 additive facilitates better coating formation and densification during thermal spraying, reducing etching rates and improving plasma resistance without complicating the manufacturing procedure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents black spots, maintains high-density and mechanically robust coatings, and allows for precise color control, reducing etching rates and improving plasma resistance in semiconductor manufacturing.
Implementation Method 1
spraying particles made of a ceramic material or the like are softened or melted by combustion or electrical energy
Implementation Method 2
spraying particles made of a ceramic material or the like are softened or melted by combustion or electrical energy
Implementation Method 3
internal chamber parts exposed to highly reactive plasma of oxygen gas or halogen gas are likely to be corroded
Implementation Method 4
highly reactive plasma of oxygen gas or halogen gas
Implementation Method 5
the content of SiO2 is 30% by weight or less, thereby it is possible to prevent black spots from being formed or an yttrium-based compound from turning black
Data Source
AI summary
An yttrium-based powder for thermal spraying and an yttrium-based thermal spray coating formed from the yttrium-based powder are proposed. The yttrium-based powder includes an yttrium-based compound and an optimally controlled amount of an oxide additive, SiO2. The yttrium-based powder inhibits formation of black spots or prevents the yttrium-based compound from turning black through plasma spray coating. The yttrium-based powder enables formation of a thermal spray coating with a desired color and improved mechanical properties.