Micromechanical Z-Acceleration Sensor Torsion Spring Protection
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Solution Overview
Problem
Conventional micromechanical z-acceleration sensors are prone to torsion spring breakage under great mechanical loads due to direct hard connections, which can lead to damage and affect motion characteristics in the xy-plane.
Innovation Solution
A micromechanical z-acceleration sensor design featuring a torsion spring connected to a seismic mass element via a bar-shaped connecting element, where the connecting element is softer than the torsion spring and seismic mass, absorbing mechanical deformation energy and reducing the risk of breakage, with specific dimensions and rounded transition areas for enhanced rigidity and durability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a torsion spring is directly connected to the seismic mass element with a hard connection, then the structural rigidity is improved, but the reliability deteriorates due to torsion spring breakage under great mechanical loads
Solution Approach 1:
A bar-shaped connecting element is introduced as an intermediary component between the torsion spring and the seismic mass element. This connecting element absorbs mechanical deformation energy during great loads, protecting the torsion spring from breakage while maintaining the structural connection. The connecting element acts as a mediator that decouples the direct hard connection, allowing energy absorption without compromising overall structural integrity.
2Reliability
If the connecting element is made softer to absorb mechanical energy, then the reliability is improved, but the rigidity deteriorates
Solution Approach 1:
The connecting element is designed with specific local properties: it is softer than the torsion spring and the seismic mass element to absorb energy, but maintains sufficient rigidity through its bar-shaped geometry and specific dimensions (width 2-5 μm, length 100-200 μm). The rounded transition areas at connection points provide local stress distribution, ensuring the element can withstand loads without breaking while still allowing controlled deformation for energy absorption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design effectively absorbs mechanical energy during high loads, reducing torsion spring damage and maintaining motion characteristics in the xy-plane, while allowing for favorable operation under great mechanical loads.
Implementation Method 1
at least a portion of mechanical deformation energy is advantageously absorbed by the connecting element
Data Source
AI summary
A micromechanical z-acceleration sensor, including a seismic mass element including a torsion spring; the torsion spring including an anchor element, with the aid of which the torsion spring is connected to a substrate; the torsion spring being connected at both ends to the seismic mass element with the aid of a bar-shaped connecting element designed as normal with respect to the torsion spring in the plane of the seismic mass element.