Z-Shaped Cooling Nozzles for Heat Processing Apparatus Temperature Uniformity
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Solution Overview
Problem
In vertical heat processing apparatuses, non-uniform cooling of wafers during the cooling process leads to product quality issues due to radiant light leakage and temperature uniformity degradation, and existing solutions complicate the structure with multiple cooling-medium introducing paths.
Innovation Solution
The apparatus features tubular heating with embedded cooling nozzles that are Z-shaped and inclined at 45° relative to the central axis, preventing radiant light leakage and creating a whirling flow to maintain temperature uniformity, while a simple structure is maintained through a shell covering the heat insulating member for cooling fluid introduction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the diameter of cooling-fluid nozzle is enlarged to increase flowrate, then cooling speed is improved, but heat dissipation caused by radiant light leakage is increased and temperature uniformity is degraded
Solution Approach 1:
The nozzle is designed with an asymmetric configuration where the inlet orifice and outlet orifice are not linearly aligned, creating a Z-shaped flow path. This asymmetric design prevents radiant light from directly escaping while maintaining adequate cooling flowrate, thus preserving temperature uniformity without sacrificing cooling speed.
Solution Approach 2:
The cooling fluid is directed to flow in a direction substantially perpendicular to the radial direction of the heater. This dimensional change in flow direction allows the cooling fluid to effectively cool the heater while the non-linearly-aligned nozzles block radiant light leakage, maintaining temperature uniformity even with larger nozzle diameters.
2Reliability
If vertically extending cooling-medium introducing paths are disposed in the heat insulating member to supply cooling medium, then cooling function is achieved, but the structure is complicated
Solution Approach 1:
The cooling-fluid introducing paths are merged with the heat insulating member as an integrated structure rather than separate components. The nozzles are directly formed in the heat insulating member, eliminating the need for separate cooling medium introducing paths and reducing structural complexity while maintaining effective cooling.
Solution Approach 2:
The heat insulating member serves multiple functions: it provides thermal insulation and simultaneously incorporates the cooling-fluid introducing paths and nozzles. This multi-functionality reduces the number of separate components needed, simplifying the overall structure while ensuring reliable cooling operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively prevents radiant light leakage, maintains temperature uniformity inside the heater, and simplifies the structure, thereby improving the uniformity of cooling temperatures and product quality.
Implementation Method 1
a cooling unit that blows out a cooling fluid into the space to cool the processing vessel; each of the blowing nozzles is formed in such a manner that an inlet orifice of the blowing nozzle and an outlet orifice thereof are not linearly aligned to each other
Implementation Method 2
a tubular heater disposed to surround the processing vessel, the tubular heater being capable of heating the objects to be processed; a heating resistor arranged on an inner circumference of the heat insulating member
Data Source
AI summary
The present invention is a heat processing apparatus comprising: a processing vessel that receives a plurality of objects to be processed in a tier-like manner to subject the objects to be processed to a predetermined heating process; a tubular heater disposed to surround the processing vessel, the tubular heater being capable of heating the objects to be processed; an exhaust heat system for discharging an atmosphere in a space between the heater and the processing vessel; and a cooling unit that blows out a cooling fluid into the space to cool the processing vessel. The heater has a tubular heat insulating member, and a heating resistor arranged on an inner circumference of the heat insulating member. The cooling unit has a plurality of blowing nozzles embedded in the heat insulating member. Each of the blowing nozzles is formed in such a manner that an inlet orifice of the blowing nozzle and an outlet orifice thereof are not linearly aligned to each other.