Horizontal-Actuated Z-Stage Mechanism for Low-Vibration Wear Detection
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Solution Overview
Problem
Conventional Z-stage mechanisms in charged particle beam devices suffer from increased vibration, raised center of gravity, and inability to detect wear or backlash, leading to decreased throughput and image quality due to direct actuator connections.
Innovation Solution
A Z-mechanism with an actuator disposed in the horizontal direction and a converting mechanism that converts horizontal output to vertical output via an elastic hinge, combined with a spring element to suppress horizontal movement and a guiding element, allowing for low-floor operation and wear detection using a built-in sensor.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of moving object
If the actuator is enlarged to secure Z-direction stroke in direct connection, then the stroke requirement is met, but the center of gravity is raised and vibration increases
Solution Approach 1:
The patent applies dimensionality change by orienting the actuator in the horizontal direction (X or Y axis) rather than the vertical Z direction. The converting mechanism then transforms this horizontal motion into vertical Z-direction motion, allowing the stage to achieve the required Z-stroke without enlarging the actuator in the Z-direction, thereby keeping the center of gravity low and reducing vibration.
2Length of moving object
If the actuator is enlarged to secure Z-direction stroke in direct connection, then the stroke requirement is met, but the throughput decreases due to increased positioning time
Solution Approach 1:
The patent applies dimensionality change by orienting the actuator in the horizontal direction (X or Y axis) rather than the vertical Z direction. The converting mechanism then transforms this horizontal motion into vertical Z-direction motion, allowing the stage to achieve the required Z-stroke without enlarging the actuator in the Z-direction, thereby keeping the center of gravity low and reducing vibration.
3Device complexity
If direct connection between table and actuator is used, then the configuration is simple, but wear and backlash cannot be detected
Solution Approach 1:
The patent introduces an intermediary converting mechanism between the actuator and the table. This mechanism includes a sensor that detects the actuator's output amount, enabling monitoring of wear and backlash in the driving mechanism while maintaining a relatively simple overall configuration.
4Stability of the object's composition
If the converting mechanism is added to convert horizontal output to vertical output, then the floor height is reduced and vibration is suppressed, but the mechanism complexity increases
Solution Approach 1:
The patent introduces an intermediary converting mechanism between the actuator and the table. This mechanism includes a sensor that detects the actuator's output amount, enabling monitoring of wear and backlash in the driving mechanism while maintaining a relatively simple overall configuration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-speed and high-accuracy focusing in charged particle beam devices by reducing vibration and detecting abnormalities, improving image quality and throughput.
Implementation Method 1
a converting mechanism configured to convert an output of the actuator from the horizontal direction to the vertical direction by elastic deformation
Data Source
AI summary
There is provided a stage device that, with a relatively simple configuration, can detect an abnormality such as wear of a driving mechanism by using a sensor incorporated in an actuator while achieving a lower floor of the driving mechanism that drives a stage in a Z-direction. The stage device includes a specimen table configured to support a specimen, an XY mechanism configured to move the specimen table in a horizontal direction, and a Z-mechanism configured to move the specimen table in a vertical direction. The Z-mechanism includes an actuator disposed in the horizontal direction and including a sensor capable of detecting an operation amount of the actuator itself, a converting mechanism configured to convert an output of the actuator from the horizontal direction to the vertical direction by elastic deformation, a spring element configured to connect the specimen table and the converting mechanism to each other, and a guiding element configured to suppress movement of the converting mechanism in the horizontal direction. The Z-mechanism drives the specimen table in the vertical direction by controlling the output of the actuator on the basis of an output of the sensor.