Zeolitic Imidazolate Framework Adsorbent for Germane Storage
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Solution Overview
Problem
Current adsorbent-based storage systems for germane (GeH4) suffer from significant decomposition during storage, leading to reduced purity and efficiency in semiconductor processing, with existing zeolitic imidazolate framework adsorbents having lower storage and deliverable capacities compared to other materials.
Innovation Solution
A storage and dispensing vessel utilizing zeolitic imidazolate framework adsorbent within a sub-atmospheric pressure environment, which effectively minimizes germane decomposition and enhances deliverable capacity, allowing for high-purity germane delivery with a storage vessel capable of dispensing at least 80-99% of the total stored germane.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If germane is stored in conventional adsorbent-based storage systems, then storage capacity is achieved, but germane decomposition occurs leading to reduced purity
Solution Approach 1:
The patent employs zeolitic imidazolate framework (ZIF) porous materials with specific pore structures and surface properties that selectively adsorb germane molecules while minimizing decomposition reactions, achieving both high storage capacity and maintained purity
Solution Approach 2:
The invention uses composite adsorbent systems combining ZIF materials with other porous materials or functional coatings to enhance both the quantity of germane stored and the purity by preventing decomposition pathways
2Quantity of substance
If traditional adsorbents are used, then storage is possible, but deliverable capacity is reduced due to decomposition
Solution Approach 1:
The patent modifies physical and chemical parameters of the adsorbent system, including pore size distribution, surface area, and chemical composition of ZIF materials, to optimize the balance between storage capacity and deliverable capacity while minimizing germane loss through decomposition
3Productivity
If storage time is extended, then vessel usage efficiency improves, but germane decomposition increases reducing purity
Solution Approach 1:
The ZIF-based storage system provides inherent protection against germane decomposition during extended storage periods, allowing vessels to be used for longer durations without replacement while maintaining purity requirements through the stabilizing properties of the adsorbent material
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves reduced germane decomposition, maintaining high purity and increasing the deliverable capacity of germane, enabling extended vessel usage and reduced waste, with the zeolitic imidazolate framework adsorbent demonstrating improved storage and delivery performance compared to traditional adsorbents.
Implementation Method 1
germane is held in sorptive relationship to a solid adsorbent medium that includes a zeolitic imidazolate framework
Implementation Method 2
germane is held in sorptive relationship to a solid adsorbent medium
Data Source
AI summary
Described are storage and dispensing systems and related methods, for the selective dispensing germane (GeH4) as a reagent gas from a vessel in which the germane is held in sorptive relationship to a solid adsorbent medium that includes a zeolitic imidazolate framework.