Zigzag Drive Region Layout for Semiconductor Memory Integration

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Solution Overview

Problem

Existing semiconductor memory devices face challenges in miniaturization and operation speed due to limited design flexibility and integration, particularly in arranging constituent elements effectively.

Innovation Solution

A semiconductor memory device design that extends the drive region into adjacent dummy regions in a zigzag manner, allowing for increased freedom in design and integration by utilizing dummy regions as space for forming drivers and improving manufacturability through uniform pattern density during the CMP process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the drive region is extended into adjacent dummy regions in a zigzag manner, then the degree of integration and design flexibility is improved, but the device complexity increases

Engineering Contradiction:

Improvedesign flexibilityVSAvoidlayout complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The drive region is extended from a conventional linear arrangement into the dummy regions in a zigzag pattern, utilizing spatial arrangement in multiple directions (both X and Y directions) to increase design flexibility and degree of integration without compromising drive capability

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Adaptability or versatility

If the drive region is extended into adjacent dummy regions, then the degree of integration is improved, but the area occupied by the drive region increases

Engineering Contradiction:

Improvedegree of integrationVSAvoiddrive region area

Core Design Contradiction:

Adaptability or versatilityVSArea of stationary object

Solution Approach 1:

The dummy regions, which traditionally served only as spacing or isolation elements, are repurposed to host portions of the drive region, enabling multi-functional utilization of the semiconductor substrate area and improving degree of integration

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Adaptability or versatility

If the drive region is extended in both X and Y directions, then the freedom in semiconductor design is improved, but the manufacturing precision requirements increase

Engineering Contradiction:

Improvedesign freedomVSAvoidpattern alignment precision

Core Design Contradiction:

Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The drive region employs an asymmetric zigzag arrangement extending into dummy regions, with different extension patterns in X and Y directions, which provides design freedom while maintaining manufacturability through careful asymmetry management

Inventive Principle:

Principle #4Asymmetry

Data Source

PatentUS8964441B2Semiconductor memory device

Publication Date: 2015.02.24 SK HYNIX INC

AI summary

A semiconductor memory device includes a plurality of first regions formed in a line-type and extending in a first direction, and a plurality of second regions and a plurality of third regions arranged between adjacent first regions in a zigzag manner.