Integrated Circuit Device With Zigzag Gate Electrodes

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Solution Overview

Problem

Current memory devices face challenges in efficiently selecting and switching memory cells due to limitations in interconnect selection mechanisms, leading to instability and reduced integration density.

Innovation Solution

The integrated circuit device employs a semiconductor substrate with strategically arranged semiconductor members and gate electrodes in a zigzag configuration, allowing for precise selection and switching of memory cells by controlling the potential applied to gate electrodes, thereby ensuring high ON/OFF current ratios and stable operations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional interconnect selection mechanisms are used to select memory cells, then memory cell selection can be performed, but half-selected members are incorrectly switched to ON state leading to instability and reduced integration density

Engineering Contradiction:
Improveoperation stabilityVSAvoidinterconnect selection mechanism complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The gate electrode is divided into multiple independent gate electrodes (first gate electrode and second gate electrode) that can be controlled separately. Each gate electrode controls a specific portion of the semiconductor member, allowing precise selection of memory cells while preventing half-selected members from switching to ON state. This segmentation enables reliable interconnect selection without requiring complex selection mechanisms.

Inventive Principle:
Principle #1Segmentation

2Quantity of substance

If memory cells are integrated two-dimensionally or three-dimensionally to increase integration density, then more memory cells can be packed, but selection and switching becomes less efficient

Engineering Contradiction:
Improveintegration densityVSAvoidselection efficiency
Core Design Contradiction:
Quantity of substanceVSProductivity

Solution Approach 1:

The patent implements a three-dimensional memory structure where semiconductor members extend in the vertical direction (third direction) perpendicular to the substrate surface. Multiple gate electrodes are positioned at different heights and locations to control different portions of the semiconductor members. This spatial arrangement in three dimensions enables high integration density while maintaining efficient selection through vertical stacking and multi-level gate control.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Adaptability or versatility

If multiple interconnects are provided parallel to each other for memory cell selection, then more memory cells can be addressed, but the selection mechanism becomes less efficient and more unstable

Engineering Contradiction:
Improvememory cell addressing capabilityVSAvoidselection stability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

Different gate electrodes are positioned to control different local regions of the semiconductor members. The first gate electrode controls a first portion while the second gate electrode controls a second portion. By applying voltages selectively to specific gate electrodes, the patent achieves precise local control of current flow through semiconductor members, enabling stable and efficient selection of specific memory cells among multiple parallel interconnects.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables high integration density and stable operations by preventing half-selected members from being switched to the ON state, resulting in a significant improvement in the ratio of ON current to OFF current and maintaining device stability.

Implementation Method 1

The selection of the interconnect can be performed by connecting a TFT (Thin Film Transistor) to the interconnect and by switching the TFT ON/OFF

Methodology Applied
Scientific EffectField effect transistor switching: Conduction (electrical)

Data Source

PatentUS9379164B2Integrated circuit device
Publication Date: 2016.06.28 KIOXIA CORP
  • US9379164B2 patent drawing
  • US9379164B2 patent drawing
  • US9379164B2 patent drawing

AI summary

An integrated circuit device according to an embodiment includes a semiconductor substrate, a first semiconductor member and a second semiconductor member provided on the semiconductor substrate, a first electrode disposed between the first semiconductor member and the second semiconductor member, and a second electrode disposed between the semiconductor substrate and the first electrode. The first semiconductor member and the second semiconductor member extend in a first direction perpendicular to an upper surface of the semiconductor substrate. The first semiconductor member and the second semiconductor member are separated in a second direction orthogonal to the first direction. The first electrode extends in a third direction intersecting both the first direction and the second direction. The second electrode extends in the third direction.