Zigzag Groove in COA Organic Layer for Array Substrate
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In the manufacturing of array substrates for display devices using COA technology, the formation of via holes in the organic layer to connect conductive layers with wires is challenging due to the large thickness of the organic layer, leading to issues like short circuits and increased production costs.
Innovation Solution
The array substrate design includes a zigzag-shaped groove in the organic layer connected to the edge of the opening exposing the wires, which reduces the slope angle and prevents residue formation during subsequent conductive layer patterning, thereby avoiding short circuits.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If via holes are formed in the thick organic layer to connect conductive layers with wires, then electrical connection is achieved, but short circuits occur and manufacturing precision deteriorates
Solution Approach 1:
The organic layer is segmented by introducing a zigzag-shaped groove that divides the opening into multiple sections. This segmentation reduces the slope angle at the edges of the opening, preventing photoresist residue accumulation and avoiding short circuits while maintaining electrical connection between conductive layers and wires.
2Quantity of substance
If the organic layer thickness is increased to cover conductive layers, then complete coverage is achieved, but via hole formation becomes more difficult
Solution Approach 1:
The zigzag-shaped groove is formed in advance within the organic layer before subsequent processing steps. This preliminary action creates a structured path that facilitates later via hole formation while maintaining the necessary organic layer thickness for complete coverage.
3Device complexity
If conventional opening edges are used in the organic layer, then simple geometry is maintained, but photoresist residue forms at edges causing short circuits
Solution Approach 1:
The opening geometry is changed from a simple symmetric shape to an asymmetric structure with a zigzag-shaped groove. This asymmetric design reduces the slope angle at the edges, preventing photoresist residue formation and avoiding short circuits while adding controlled complexity to the geometry.
Data Source
AI summary
An array substrate, a manufacturing method thereof, a display device, and a mask are provided. The array substrate includes a base substrate; a first conductive layer located on the base substrate; and an organic layer located on a side of the first conductive layer away from the base substrate, the peripheral region includes at least one bonding region, in each bonding region, the first conductive layer includes multiple wires arranged at intervals, the organic layer includes a first opening exposing the wires, the first opening includes an edge intersected with an extension direction of each wires, and the organic layer further includes a zigzag-shaped groove connected with the edge; in a direction perpendicular to the base substrate, a depth of the zigzag-shaped groove is less than a thickness of the organic layer, an orthographic projection of the zigzag-shaped groove on a plane parallel with the base substrate is zigzag-shaped.