Zigzag Pixel Electrodes for Silver Etching Residue Control
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Solution Overview
Problem
The challenge in organic EL display devices is the difficulty in controlling the etching process of silver thin films, which can lead to residue formation and potential short circuits between anode electrodes, especially when using a tilted substrate and strong oxidizing etching solutions.
Innovation Solution
The design incorporates pixel electrodes with zigzag or concave/convex shapes to retain the etching solution, reducing residue formation by ensuring the etchant stays longer between electrodes, and using a stacked conductive film structure with IZO and silver layers for improved etching control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a tilted substrate and strong oxidizing etching solution are used to etch silver thin films, then the etching process can be performed, but residue formation occurs and short circuits between anode electrodes may result
Solution Approach 1:
The anode electrode is designed with a curved upper surface instead of a flat surface. This curvature causes the etching solution to accumulate at the vicinity of the electrode, increasing the contact time between the etchant and the silver thin film, thereby improving etching efficiency while maintaining manufacturing precision through controlled residue formation
Solution Approach 2:
The patent applies different surface characteristics to different regions of the electrode structure. The upper surface is made curved to enhance etching solution retention, while the lower surface maintains specific properties for proper adhesion and electrical connection, creating local quality variations that optimize both etching performance and structural integrity
2Illumination intensity
If silver and silver alloy are used as reflective electrodes to increase luminous efficiency, then the display performance improves, but the etching process becomes difficult to control
Solution Approach 1:
By forming the silver reflective electrode with a curved upper surface, the patent enhances the retention of etching solution at the electrode vicinity. This curvature design allows for more controlled and complete etching of the silver layer, reducing residue formation while maintaining the high reflectivity and luminous efficiency properties of the silver material
Solution Approach 2:
The patent modifies the surface geometry parameter of the silver electrode from flat to curved, which fundamentally changes how the etching solution interacts with the silver surface. This parameter change improves etching control and reduces residue formation, making the manufacturing process more reliable while preserving the optical properties of silver
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively minimizes residue formation during the etching process, preventing operational defects in the display device and ensuring reliable electrode formation.
Implementation Method 1
when using a tilted substrate and strong oxidizing etching solutions
Data Source
AI summary
A semiconductor device including a region arranged with a plurality of electrodes in a matrix, wherein the plurality of electrodes includes a plurality of first electrodes located along any one side of the region and a plurality of second electrodes located closer to the center of the region than the plurality of first electrodes, the first electrode and the second electrode have a different outline in a planar view, and the outline of the plurality of first electrodes includes a side having a zigzag shaped side or concave/convex shape.