Zinc Oxide Synthesis Fluid Handling System

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Solution Overview

Problem

Current methods for synthesizing zinc oxide (ZnO) at a laboratory scale are not economically scalable for industrial production, lacking the flexibility and precision needed for high-volume, cost-effective manufacturing while maintaining quality and consistency.

Innovation Solution

A system for synthesizing zinc oxide using a low-temperature aqueous solution process with a fluid handling system that allows for precise control of growth parameters such as temperature, pressure, and solution composition, ensuring consistent and repeatable results through a closed fluid handling system and a wafer substrate holder that rotates to ensure uniform growth.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a laboratory-scale ZnO synthesis process is used, then high-quality ZnO crystals can be produced, but the process is not economically scalable for industrial production

Engineering Contradiction:
ImproveZnO crystal qualityVSAvoidproduction volume
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The system segments the synthesis process into distinct functional modules: a fluid handling system for precise solution delivery, a rotating wafer substrate holder for uniform exposure, and a controlled chamber environment. This modular segmentation allows the laboratory-quality process to be replicated and scaled across multiple substrates simultaneously while maintaining consistent crystal quality throughout large-volume production

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The fluid handling system and rotating substrate holder are designed as universal components that can accommodate different substrate types and synthesis conditions. The system can handle multiple wafers in sequence or parallel, making the same apparatus suitable for both small-scale high-precision synthesis and large-scale industrial production, thereby resolving the scalability contradiction

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Productivity

If industrial-scale production is implemented, then productivity increases, but precision and consistency of ZnO synthesis may deteriorate

Engineering Contradiction:
Improveproduction volumeVSAvoidsynthesis consistency
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The system incorporates feedback control through the rotating wafer substrate holder that ensures each substrate receives identical exposure conditions to the aqueous solution. The rotation mechanism provides consistent fluid distribution and heat transfer across all substrates, maintaining synthesis precision even when processing large batches simultaneously, thus preventing quality deterioration at industrial scale

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system maintains synthesis consistency by precisely controlling key parameters including temperature, solution composition, and flow rates through the fluid handling system. These parameters can be adjusted and optimized for different production volumes while maintaining the same quality standards, allowing the system to scale productivity without sacrificing precision

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If a closed fluid handling system with rotating substrate holder is used, then synthesis precision and uniformity improve, but device complexity increases

Engineering Contradiction:
Improvegrowth uniformityVSAvoidsystem structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The rotating wafer substrate holder serves multiple functions simultaneously: it positions substrates for uniform solution exposure, facilitates even heat distribution, enables controlled fluid flow across all substrates, and simplifies loading/unloading operations. This self-service capability reduces the need for additional complex control mechanisms while maintaining high growth uniformity, thereby justifying the system complexity through functional integration

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the production of high-quality zinc oxide crystals with controlled properties, facilitating scalable and cost-effective industrial production while maintaining the precision and consistency required for industrial applications.

Implementation Method 1

growing one or more zinc oxide crystals in an aqueous solution

Methodology Applied
Scientific EffectChemical deposition: Deposition (physical)

Implementation Method 2

a wafer substrate holder that rotates to ensure uniform growth

Methodology Applied
Scientific EffectRotational convection: Convection

Data Source

PatentUS10981801B2Fluid handling system for synthesis of zinc oxide
Publication Date: 2021.04.20 SEOUL SEMICONDUCTOR
  • US10981801B2 patent drawing
  • US10981801B2 patent drawing
  • US10981801B2 patent drawing

AI summary

Briefly, embodiments of systems and/or methods for synthesis of zinc oxide are described, including a chamber enclosure, a wafer substrate holder, a fluid handling system, and sequences for implementation.