TiN-Buffered ZnO Nanorod Growth via Low-Temperature Hydrothermal Synthesis

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional high-temperature vapor-phase processes for forming one-dimensional metal oxide nanostructures, such as ZnO, are costly and energy-intensive, necessitating a low-temperature, cost- and energy-effective method for their synthesis.

Innovation Solution

A method involving the formation of a TiN film on a substrate, followed by immersion in an aqueous mixture containing hexamethylenetetramine and a metal nitrate, and subsequent heating at temperatures ranging from 50° C. to 100° C. for 60 to 180 minutes to grow vertically aligned metal oxide nanostructures, such as ZnO nanorods.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional high-temperature vapor-phase processes are used to form metal oxide nanostructures, then the nanostructures can be formed with good crystallinity, but the process requires high energy consumption and high cost

Engineering Contradiction:
Improvecrystallinity of nanostructuresVSAvoidenergy consumption
Core Design Contradiction:
Manufacturing precisionVSUse of energy by moving object

Solution Approach 1:

The patent changes the temperature parameter from conventional high-temperature (typically >500°C) to low-temperature (50-100°C) hydrothermal synthesis. This parameter change enables the formation of metal oxide nanostructures with good crystallinity while dramatically reducing energy consumption. The aqueous mixture containing hexamethylenetetramine and metal nitrate serves as the chemical environment that facilitates low-temperature crystal growth.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent replaces the mechanical/thermal vapor-phase deposition process with a chemical hydrothermal synthesis process. Instead of using high-temperature vapor transport and condensation, the invention uses aqueous chemical reactions at low temperature to form metal oxide nanostructures, substituting a chemical mechanism for a thermal-mechanical one.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Manufacturing precision

If conventional high-temperature vapor-phase processes are used to form metal oxide nanostructures, then the nanostructures can be formed, but the process is costly and time-consuming

Engineering Contradiction:
Improveformation of nanostructuresVSAvoidproduction time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

By changing the temperature parameter to low-temperature conditions (50-100°C) and using hydrothermal synthesis, the patent achieves rapid nanostructure formation. The low-temperature aqueous process with hexamethylenetetramine and metal nitrate enables complete synthesis in 60-180 minutes, significantly faster than conventional high-temperature methods that require prolonged heating and cooling cycles.

Inventive Principle:
Principle #35Parameter changes

3Use of energy by moving object

If low-temperature hydrothermal synthesis is used to form metal oxide nanostructures, then energy consumption is reduced, but the process requires specific chemical conditions and TiN buffering

Engineering Contradiction:
Improveenergy consumptionVSAvoidprocess complexity
Core Design Contradiction:
Use of energy by moving objectVSDevice complexity

Solution Approach 1:

The patent applies preliminary action by depositing a TiN buffer layer on the substrate before performing the hydrothermal synthesis. This pre-prepared buffer layer creates the necessary chemical environment for low-temperature metal oxide growth, enabling the energy-efficient hydrothermal process to proceed successfully. The TiN layer acts as a preparatory foundation that simplifies the subsequent low-temperature synthesis.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables the low-temperature growth of metal oxide nanostructures, reducing energy consumption and production time while maintaining high crystallinity and alignment, making it suitable for electronic and optoelectronic devices and potentially scalable for large-scale production.

Implementation Method 1

The TiN film is formed on the substrate by evaporating Ti metal in an N2 atmosphere

Methodology Applied
Scientific EffectEvaporation: Evaporation

Implementation Method 2

The TiN film is formed on the substrate by evaporating Ti metal in an N2 atmosphere

Methodology Applied
Scientific EffectPhysical Vapour Deposition: Physical Vapour Deposition

Implementation Method 3

heating the aqueous mixture at a temperature ranging from about 50° C. to about 100° C. for a period of time to form the metal oxide nanostructures

Methodology Applied
Scientific EffectHeating: Heating

Data Source

PatentUS11976365B1Method of forming metal oxide nanostructures on a TiN-buffered-substrate
Publication Date: 2024.05.07 KING FAISAL UNIV
  • US11976365B1 patent drawing
  • US11976365B1 patent drawing

AI summary

A method of forming one-dimensional metal oxide nanostructures includes forming a TiN film on a substrate to provide a TiN-coated substrate; providing an aqueous mixture including hexamethylenetetramine and a metal nitrate, contacting the TiN-coated substrate with the aqueous mixture such that the TiN film on the substrate is in the aqueous mixture, and heating the aqueous mixture at a temperature ranging from about 50° C. to about 100° C. for a period of time ranging from about 60 minutes to about 180 minutes to form the metal oxide nanostructures. The method offers a low-temperature approach for the growth of metal oxide nanostructures. In an embodiment, the metal oxide is zinc oxide (ZnO) and the metal nitrate is zinc nitrate. In an embodiment the substrate is a Si/SiO2 substrate. In an embodiment, the metal oxide nanostructures include one-dimensional nanostructures, such as nanorods.