Zirconium Oxide Insulation Film Adhesion in Liquid Jet Actuator
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Solution Overview
Problem
The manufacturing process of actuator devices for liquid jet heads faces challenges such as delamination of vibration plates due to low adhesion properties between zirconium oxide and silicon dioxide films, and diffusion of lead components from piezoelectric material layers, which complicates the formation of high-density piezoelectric elements and reduces the reliability of the devices.
Innovation Solution
A manufacturing method involving the formation of a zirconium layer with high crystallinity on a passage-forming substrate, followed by thermal oxidation to create a zirconium oxide insulation film with excellent adhesion properties, which prevents delamination and diffusion of lead components, thereby enhancing the durability and reliability of the actuator devices.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a zirconium oxide film is formed on a silicon dioxide film to prevent lead diffusion, then the melting point stability is improved, but the adhesion properties deteriorate causing delamination
Solution Approach 1:
A zirconium layer is introduced as an intermediary between the silicon dioxide film and the zirconium oxide film. This zirconium layer serves as a mediator that prevents direct contact between the incompatible zirconium oxide and silicon dioxide films, thereby preventing delamination while still blocking lead diffusion to the silicon dioxide film.
Solution Approach 2:
The structure employs a composite material system consisting of three layers: silicon dioxide film, zirconium layer, and zirconium oxide film. This composite structure combines the lead-blocking properties of zirconium oxide with the adhesion properties of the zirconium layer, achieving both protection and bonding functionality.
2Manufacturing precision
If piezoelectric elements are made independent for each pressure generating chamber to achieve high-density arrangement, then the manufacturing precision is improved, but the device complexity increases
Solution Approach 1:
The piezoelectric element is segmented into three functional layers: lower electrode, piezoelectric material layer, and upper electrode. These segmented layers can be formed using standardized deposition and lithography processes, enabling precise positioning for each pressure generating chamber while maintaining manufacturing efficiency.
Solution Approach 2:
The manufacturing process uses universal deposition and lithography techniques that can be applied repeatedly across multiple pressure generating chambers. This multi-functional approach allows the same process steps to create precisely positioned piezoelectric elements for all chambers, reducing overall process complexity despite the high-density arrangement requirement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method ensures increased adhesion between the zirconium oxide insulation film and the silicon dioxide elastic film, stabilizes the quality of the piezoelectric layers, and prevents delamination, resulting in improved durability and reliability of the actuator devices and liquid jet apparatuses.
Implementation Method 1
forming an insulation film made of zirconium oxide and constituting a part of the vibration plate by subjecting the zirconium layer to thermal oxidation
Implementation Method 2
An actuator device including piezoelectric elements which undergo displacement by being applied with voltage
Implementation Method 3
forming a zirconium layer on one side of the passage-forming substrate by sputtering
Data Source
AI summary
A manufacturing method of a liquid jet head having increased the durability and reliability thereof by preventing delamination of a vibration plate is provided. At least the following two steps are included: a vibration plate forming step which includes at least a step of forming a zirconium layer on one side of a passage-forming substrate by sputtering so that a degrees of orientation to a (002) plane of the surface becomes equal to 80% or more, as well as forming an insulation film made of zirconium oxide and constituting a part of the vibration plate by subjecting the zirconium layer to thermal oxidation; and a piezoelectric element forming step of forming piezoelectric elements on the vibration plate.