Zinc Group 4 Nitride Piezoelectric Composition Design
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Solution Overview
Problem
Existing simulations of nitride piezoelectric materials are based on ideal conditions and do not provide practical compositions suitable for use in piezoelectric thin films, as they do not consider dimensions and shapes, and assume stoichiometric ratios that may not be achievable in real-world applications.
Innovation Solution
Development of nitride compositions containing zinc and a group 4 element, such as titanium or zirconium, with specific atomic percentage ratios, and optionally including aluminum, to enhance piezoelectric properties and ferroelectric properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If simulation by first-principles calculation is used to determine nitride composition, then theoretical piezoelectric properties can be evaluated, but practical applicability cannot be confirmed due to idealized conditions and stoichiometric assumptions
Solution Approach 1:
The patent changes the composition parameters of the nitride by introducing specific non-stoichiometric ratios and controlling the ratio of group 4 element to (zinc + group 4 element) between 20-50 atom%, deviating from ideal stoichiometric conditions to achieve practical piezoelectric properties that match theoretical predictions
Solution Approach 2:
The patent creates a practical material composition that copies the theoretically optimal structure identified by first-principles calculation, translating the idealized simulation results into a manufacturable thin film with controlled composition ratios and crystal structure
2Measurement precision
If aluminum is added to nitride containing zinc and group 4 element to increase d33, then piezoelectric properties improve, but chemical bond hardness increases which may deteriorate piezoelectric properties
Solution Approach 1:
The patent optimizes the aluminum content parameter within a specific range (5-30 atom%) to achieve the desired balance between increasing d33 and maintaining acceptable bond hardness, demonstrating that controlled parameter adjustment can resolve apparent contradictions
Solution Approach 2:
The patent creates a composite nitride material containing zinc, group 4 element (Ti, Zr, or Hf), and aluminum, where the synergistic combination of elements produces enhanced piezoelectric properties that overcome the limitations of individual elements or simpler compositions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed nitride compositions exhibit improved piezoelectric properties, including increased d33 values, and ferroelectric properties, such as residual polarization, making them suitable for practical use in piezoelectric and ferroelectric elements.
Implementation Method 1
a piezoelectric effect or an inverse piezoelectric effect of a piezoelectric thin film is used
Implementation Method 2
ferroelectric properties, such as residual polarization
Data Source
AI summary
A nitride contains zinc and a group 4 element. The group 4 element contained in the nitride is at least one kind of element selected from the group consisting of titanium and zirconium. A content of zinc in the nitride is expressed as [Zn] atomic %. A total content of the group 4 element in the nitride is expressed as [M] atomic %. In the nitride, [M]/([Zn]+[M]) is more than 20% and less than 50%.